We present a procedure for producing high-aspect-ratio cantilevered micro-and nanorod arrays of a PDMS−ferrofluid composite material. The rods have been produced with diameters ranging from 200 nm to 1 µm and aspect ratios as high as 125. We demonstrate actuation of these superparamagnetic rod arrays with an externally applied magnetic field from a permanent magnet and compare this actuation with a theoretical energy-minimization model. The structures produced by these methods may be useful in microfluidics, photonic, and sensing applications.High-aspect-ratio nanostructures have attracted increasing attention in the nanotechnology community due to their potential applications as sensors 1-3 and actuators 4-7 and the effect of their presence on the surface properties of a material such as adhesion 8-11 and wetting. 12-14 We are interested in producing high-aspect-ratio nanostructures to serve as biomimetic cilia for the purpose of studying the mechanics of nanoscale fluid flow in a ciliated system. To this end, we have produced soft polymeric, actuable nanostructures of the size of biological cilia (∼10 µm in length by ∼200 nm diameter.) High-aspect-ratio polymer rods have been produced with materials with elastic moduli on the order of 100 MPa, 12-13 but these are unsuitable as actuating mechanisms due to their stiffness. Softer materials, such as poly(dimethyl siloxane) (PDMS, E ∼ 2 MPa), have been reported to fail at large aspect ratios due to lateral or ground collapse. 15,16 In addition, in many cases, rodlike microstructures are fabricated via a photolithographic master 15,16 or anodized aluminum oxide (AAO) membrane. 17 However, conventional photolithographic molds involve lengthy or specialized processing to produce large arrays of upright high-aspectratio structures, and AAO membranes impose severe limits on the diameter and spacing of the pores. Furthermore, with soft materials, photolithographic lift-off procedures may lead to structure collapse. Particle track-etched membranes have successfully been used as a template for a variety of materials [18][19][20] and are able to produce high-aspect-ratio structures with variable spacing and diameter. We use polycarbonate track-etched (PCTE) membranes as templates, allowing us to freely select the length and diameter of the rods and the density of the rod array by choosing an appropriate membrane.The high-aspect-ratio and low elastic modulus of our PDMS rods lend them a flexibility that makes them ideally suited to serve as actuators. To this end, we have produced micro-and nanorod arrays using a composite material of PDMS and iron oxide nanoparticles, which results in flexible superparamagnetic rods that may be actuated by applied external magnetic fields. Other groups have devised highaspect-ratio magnetically actuated microstructures via linkedbead chains, 3,7 and Singh, et al. have succeeded in tethering these structures to a substrate. 6 Our templated structures do not necessarily require a liquid medium, have the advantage of being scalable b...