Synthesis of Vertical Graphene by Microwave Plasma Enhanced Chemical Vapor Deposition Technique

Bisht, Atul; Chockalingam, Sreekumar; Panwar, O. S.; Singh, Bhanu Pratap; Kesarwani, Ajay Kumar; Chand, Jagdish

doi:10.1007/978-3-319-03002-9_140

Cited by 2 publications

(1 citation statement)

References 14 publications

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“…PECVD provides several advantages compared to other techniques, including a lower substrate temperature, a higher growth rate, and a better control on nanostructure ordering due to the presence of energetic electrons, excited molecules/atoms, free radicals, photon, and other active species in the plasma region. Compared with thermal CVD which is based on neutral gas chemistry, PECVD is a more complex process, which can manipulate the morphology and structure of VG by altering the plasma source and adjusting a series of parameters. − …”

Section: Introductionmentioning

confidence: 99%

Insights into the Mechanism for Vertical Graphene Growth by Plasma-Enhanced Chemical Vapor Deposition

Sun

Rattanasawatesun

Tang

et al. 2022

ACS Appl. Mater. Interfaces

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Vertically oriented graphene (VG) has attracted attention for years, but the growth mechanism is still not fully revealed. The electric field may play a role, but the direct evidence and exactly what role it plays remains unclear. Here, we conduct a systematic study and find that in plasma-enhanced chemical vapor deposition, the VG growth preferably occurs at spots where the local field is stronger, for example, at GaN nanowire tips. On almost round-shaped nanoparticles, instead of being perpendicular to the substrate, the VG grows along the field direction, that is, perpendicular to the particles' local surfaces. Even more convincingly, the sheath field is screened to different degrees, and a direct correlation between the field strength and the VG growth is observed. Numerical calculation suggests that during the growth, the field helps accumulate charges on graphene, which eventually changes the cohesive graphene layers into separate three-dimensional VG flakes. Furthermore, the field helps attract charged precursors to places sticking out from the substrate and makes them even sharper and turn into VG. Finally, we demonstrate that the VG-covered nanoparticles are benign to human blood leukocytes and could be considered for drug delivery. Our research may serve as a starting point for further vertical two-dimensional material growth mechanism studies.

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Section: Introductionmentioning

confidence: 99%