“…CVD, on the other hand, requires the use of highly volatile source materials. Also, a singre supercritical fluid can be made to simultaneously deposit a multi-component In addition to metals, other materials of interest to the microelectronics industry have been synthesized in supercritical fluids, including Si02 films in supercritical alcohol, [21] nitrides and sulfides in supercritical ammonia, [22,23,24] sulfides in supercritical amines, [25,26] transition metal oxides in supercritical water, [27] in SCCO2, [28] and in supercritical alcoho1, [29,30] and rare-earth-based phosphors in SCCO2. [3 13.…”