1996
DOI: 10.1016/s0896-8446(96)90029-7
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Synthesis of titanium dioxide particles in supercritical CO2

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Cited by 38 publications
(30 citation statements)
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“…CVD, on the other hand, requires the use of highly volatile source materials. Also, a singre supercritical fluid can be made to simultaneously deposit a multi-component In addition to metals, other materials of interest to the microelectronics industry have been synthesized in supercritical fluids, including Si02 films in supercritical alcohol, [21] nitrides and sulfides in supercritical ammonia, [22,23,24] sulfides in supercritical amines, [25,26] transition metal oxides in supercritical water, [27] in SCCO2, [28] and in supercritical alcoho1, [29,30] and rare-earth-based phosphors in SCCO2. [3 13.…”
Section: Supercritical C02 As a Surface-cleaning Solventmentioning
confidence: 99%
“…CVD, on the other hand, requires the use of highly volatile source materials. Also, a singre supercritical fluid can be made to simultaneously deposit a multi-component In addition to metals, other materials of interest to the microelectronics industry have been synthesized in supercritical fluids, including Si02 films in supercritical alcohol, [21] nitrides and sulfides in supercritical ammonia, [22,23,24] sulfides in supercritical amines, [25,26] transition metal oxides in supercritical water, [27] in SCCO2, [28] and in supercritical alcoho1, [29,30] and rare-earth-based phosphors in SCCO2. [3 13.…”
Section: Supercritical C02 As a Surface-cleaning Solventmentioning
confidence: 99%
“…Studies have also been performed on the SAS preparation of TiO 2 in both batch and semi-continuous modes using acetylacetonate and alkoxide precursors [33][34][35][36]. These studies include the use of supercritical CO 2 to induce hydrolysis of alkoxides [33] and also to facilitate the polymerisation of alkoxides with acetic acid, akin to a sol-gel process [36]. Calcination of these precursors has resulted in various TiO 2 morphologies and significantly different anatase/rutile compositions.…”
Section: Introductionmentioning
confidence: 99%
“…1 As a result, scCO 2 has been widely used for chemical processes, e.g., extraction and separation, chemical reactions, and material processing. [2][3][4][5][6][7] Recently, direct sol-gel reactions in scCO 2 have attracted much attention for synthesizing oxide nanomaterials. As examples, SiO 2 monolithic aerogels and nanoparticles have been synthesized by the reaction of silicon alkoxides with formic/acetic acid; 8-10 TiO 2 and ZrO 2 nanofibers, nanospheres, and mesoporous monoliths have been produced by polycondensation of metal alkoxides with either acetic acid or water droplets with the aid of surfactants.…”
Section: Introductionmentioning
confidence: 99%