Synthesis of Thin Film Structures of Zirconium Oxide by Spray Pyrolysis

Zinchenko, Timur O.; Pecherskaya, Ekaterina A.; Golubkov, Pavel E.; Karpanin, Oleg V.; Gurin, Sergey A.; Novichkov, Maxim D.

doi:10.1109/apeie59731.2023.10347634

2023 IEEE XVI International Scientific and Technical Conference Actual Problems of Electronic Instrument Engineering (APEIE) 2023

DOI: 10.1109/apeie59731.2023.10347634

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Synthesis of Thin Film Structures of Zirconium Oxide by Spray Pyrolysis

Timur O. Zinchenko,

Ekaterina A. Pecherskaya,

Pavel E. Golubkov

et al.

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Synthesis of Thin Film Structures of Zirconium Oxide by Spray Pyrolysis

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References 9 publications

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