2018
DOI: 10.22161/ijaers.5.8.14
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Synthesis of Silicon Nitride Ceramic Material using Direct Nitridation Process

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Cited by 4 publications
(3 citation statements)
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“…The two specific phases are detected in XRD patterns such as α -Si 3 N 4 , β -Si 3 N 4 and Si. As can be seen from Figure 5, the concentration of the α phase is higher than that of the β phase and this leads to enhancement of the hardness of the coated sample [19]. α -Si 3 N 4 with accumulating track in structure is generally harder than the β -Si 3 N 4 [20].…”
Section: Resultsmentioning
confidence: 99%
“…The two specific phases are detected in XRD patterns such as α -Si 3 N 4 , β -Si 3 N 4 and Si. As can be seen from Figure 5, the concentration of the α phase is higher than that of the β phase and this leads to enhancement of the hardness of the coated sample [19]. α -Si 3 N 4 with accumulating track in structure is generally harder than the β -Si 3 N 4 [20].…”
Section: Resultsmentioning
confidence: 99%
“…Because of their high thermal conductivity and excellent mechanical properties, silicon nitride (Si 3 N 4 ) ceramics have been successfully applied as insulated substrates in the semiconductor power modules mounted on inverters assembled in Electric Vehicle (EV) and Hybrid Electric Vehicle (HEV) [1,2]. There exist three crystallographic structures of Si 3 N 4 , designated as α-, βand γ-phases (Figure S1 and Table S1) [3][4][5]. The αand β-Si 3 N 4 , phases are common and can be produced under normal pressure conditions, while the γ-phase can only be synthesized under high pressures above 13 GPa and temperatures above 1600 • C [4,5].…”
Section: Introductionmentioning
confidence: 99%
“…Because of their high thermal conductivity and excellent mechanical properties, silicon nitride (Si 3 N 4 ) ceramics have been successfully applied as insulated substrates in the semiconductor power modules mounted on inverters assembled in Electric Vehicle (EV) and Hybrid Electric Vehicle (HEV) [1,2]. There exist three crystallographic structures of Si 3 N 4 , designated as α-, βand γ-phases (Figure S1 and Table S1) [3][4][5]. The αand β-Si 3 N 4 , phases are common and can be produced under normal pressure conditions, while the γ-phase can only be synthesized under high pressures above 13 GPa and temperatures above 1600 • C [4,5].…”
Section: Introductionmentioning
confidence: 99%