1998
DOI: 10.1016/s0921-5093(97)00730-2
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Synthesis of silicon-based polymer films by UV laser ablation deposition of poly(methylphenylsilane)

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Cited by 17 publications
(8 citation statements)
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“…As established in [13,25], the indicated energy is 1.95-2.21 eV, which is considerably lower than the energy of the T 1 (σσ) * → S 0 (0-0) transition in the segments (≈2.7 eV), measured at the maximum of the phosphorescence band (λ max ≈ 460 nm).…”
mentioning
confidence: 70%
See 1 more Smart Citation
“…As established in [13,25], the indicated energy is 1.95-2.21 eV, which is considerably lower than the energy of the T 1 (σσ) * → S 0 (0-0) transition in the segments (≈2.7 eV), measured at the maximum of the phosphorescence band (λ max ≈ 460 nm).…”
mentioning
confidence: 70%
“…Degradation begins with breaking of the Si-Si bond. Then crosslinks are formed between macromolecules, cyclic structures are formed, and when irradiated by light in air compounds are formed containing Si-O-Si, Si-H, and Si-OH bonds [1,12,13]. Therefore PMPS and its copolymers are used as photoresists for microlithography [1,12] and also as precursors in making interface microlenses [14] and forming hybrid polysilane-silica films with controllable refractive index [15].…”
mentioning
confidence: 99%
“…The height of the grains reaches up to 30 nm as determined from measurements of surface pro les by the Talystep. The grain structure observed at plasma polymer surfaces [27][28][29] depends on the RF power. Pp-VTES lms without surface grains and with a low roughness ranging from 0.5 nm (0.05 W) up to 3 nm (25 W) can be deposited using pulsed plasma regime.…”
Section: Chemical Structurementioning
confidence: 99%
“…7 It is also a very promising tool for polymer-film synthesis. [8][9][10][11][12][13] Although many groups have reported on the synthesis of materials by photo-reaction induced by infrared lasers, [14][15][16][17][18] those induced by excimer lasers are relatively few. [19][20][21][22][23][24][25] In the present paper, we report on synthesis of silicon-based polymer films by excimer laser-induced photoreaction of phenylsilane and methylphenylsilane.…”
Section: Introductionmentioning
confidence: 99%