Synthesis of pentameric chlorotin carboxylate clusters for high resolution EUV photoresists under small doses

Abstract

This work reports the synthesis and characterization of a novel pentameric tin chloro cluster, (vinylSn)3Sn2Cl5O2(OH)2(t-BuCO2)6 (1), and explores its application as an efficient negative-tone photoresist in a 1:2 weight ratio...