“…Among several existing fabrication techniques for metallic nanoparticles, involving, for example nanosphere lithography [14], electron beam lithography [15], nanoimprint lithography [16], laser ablation [17], and ion implantation [18], many others [19], the ion implantation is now recognised as one of the simplest, cheapest, and most efficient techniques. Main advantages of ion implantation are fast, precise and independent control of impurity depth and dose, and ability of multi-energy implants for complex profiles.…”