2014
DOI: 10.1007/s00289-014-1289-9
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Synthesis of novel branched UV-curable methacrylate copolymer and its application in negative photoresist

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Cited by 8 publications
(9 citation statements)
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“…Photopolymerization has attracted increasing attention in recent years due to its broad applications in adhesives, [1] coatings, [2] printing inks, [3] 3D printing, [4,5] photoresists, [6] and microelectronics [7] (Figure 1).…”
Section: Introductionmentioning
confidence: 99%
“…Photopolymerization has attracted increasing attention in recent years due to its broad applications in adhesives, [1] coatings, [2] printing inks, [3] 3D printing, [4,5] photoresists, [6] and microelectronics [7] (Figure 1).…”
Section: Introductionmentioning
confidence: 99%
“…These waterborne photoresists feature being prone to purify, cost-effective, and nontoxic, which is apt to bring about a promising avenue for eco-friendly development of photoresists in the future. 15,16 Hence, this study focuses on the choice and investigation of a waterborne photoresist as a preferred material. Furthermore, the development of high-performance waterborne photoresists necessitates the design of high-performance photoresist resins that satisfy industrial standards.…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, it poses a threat to operators in terms of health and safety that VOCs have been linked to symptoms such as drowsiness, headaches, and vertigo. Prolonged exposure to high levels of VOCs may lead to respiratory diseases, cancer, and fatalities. , To address these concerns, waterborne photoresists have emerged as a research and development hotspot in recent years. These waterborne photoresists feature being prone to purify, cost-effective, and nontoxic, which is apt to bring about a promising avenue for eco-friendly development of photoresists in the future. , Hence, this study focuses on the choice and investigation of a waterborne photoresist as a preferred material.…”
Section: Introductionmentioning
confidence: 99%
“…Photoresists find applications in integrated circuits, buffer coat layers for IC chips, manufacturing of printing plates, and color, filters [19]. Photoresist on being exposed to high-energy radiations, such as ultraviolet (UV) light, electron-beam, or X-rays, leads to certain chemical reactions in the exposed areas, changing its solubility.…”
Section: Introductionmentioning
confidence: 99%