2016
DOI: 10.1142/s0219581x15500271
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Synthesis of Nanosized Titanium Oxide and Nitride Through Vacuum Arc Plasma Expansion Technique

Abstract: Physical vapor deposition techniques such vacuum arc plasma deposition — which are very commonly used in thin film technology — appear to hold much promise for the synthesis of nanocrystalline thin films as well as nanoparticles. Monodisperse and spherical titanium oxide (TiO2) and nitride nanoparticles were produced at room temperature as a cluster beam in the gas phase using a cluster-deposition source. Using the basic principles of the gas condensation method, this study has developed vacuum arc nanoparticl… Show more

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Cited by 25 publications
(9 citation statements)
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“…The experimental setup and the dependence of powder properties on spraying conditions are discussed in detail in [13][14][15][16][17]. Argon, which was fed through an evaporator, was used as a plasma-forming gas, and created a base pressure in the chamber.…”
Section: Methodsmentioning
confidence: 99%
“…The experimental setup and the dependence of powder properties on spraying conditions are discussed in detail in [13][14][15][16][17]. Argon, which was fed through an evaporator, was used as a plasma-forming gas, and created a base pressure in the chamber.…”
Section: Methodsmentioning
confidence: 99%
“…Экспериментальная установка и зависимость свойств порошка от условий распыления подробно обсуждаются в [14][15][16][17][18][19]. Параметры распыления и осаждения приведены в табл.…”
Section: методики экспериментаunclassified
“…Наличие в плазме сверхнасыщенных паров исходных соединений и высокие скорости их закалки при определённых условиях приводят к образованию наночастиц. Изменение энергии частиц в процессе конденсации позволяет получать различные структуры конкретного материала от аморфных до кристаллических, при этом размеры, форма кристаллов меняются в зависимости от энергии [12][13][14][15][16]. Настоящая ра-бота направлена на выяснение особенностей структурнофазового состояния и магнитных свойств наночастиц на основе ферритов, полученных в плазме дугового разряда низкого давления.…”
Section: Introductionunclassified