2014
DOI: 10.1155/2014/745736
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Synthesis of ReN3 Thin Films by Magnetron Sputtering

Abstract: In this work ReNx films were prepared by reactive magnetron sputtering at room temperature and deposited on a silicon wafer. It was found that the diffractograms of the nitrogen-rich rhenium film are consistent with those produced by high-pressure high-temperature methods, under the assumption that the film is oriented on the substrate. Using density functional calculations it was found that the composition of this compound could be ReN3, instead of ReN2, as stated on previous works. The ReN3 compound fits in… Show more

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Cited by 5 publications
(7 citation statements)
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“…Hitherto, ReN 3 with the orthorhombic symmetry Ama 2 has the highest known nitrogen content for the Re−N system. It was synthesized in the form of thin films by reactive magnetron sputtering . There are a number of theoretically predicted nitrogen‐rich compounds, that can have similar (ReN 3 ( Imm 2)) or even higher nitrogen content, ReN 4 ( Pbca , Cmmm ).…”
Section: Figurementioning
confidence: 99%
“…Hitherto, ReN 3 with the orthorhombic symmetry Ama 2 has the highest known nitrogen content for the Re−N system. It was synthesized in the form of thin films by reactive magnetron sputtering . There are a number of theoretically predicted nitrogen‐rich compounds, that can have similar (ReN 3 ( Imm 2)) or even higher nitrogen content, ReN 4 ( Pbca , Cmmm ).…”
Section: Figurementioning
confidence: 99%
“…These techniques include chemical vapor deposition (CVD), chemical vapor infiltration (CVI), pulsed laser evaporation (PLE), electron‐beam evaporation, electrodeposition, molecular beam epitaxy (MBE), and magnetron sputtering . Even more limited has been the preparation of rhenium nitrides which have been synthesized by sputtering, ion implantation, pulsed laser deposition, and high‐pressure solid‐state metathesis . There is thus still room for introducing new methods for preparing these intriguing refractory/noble metal materials to make them more widely available for various applications using highly controllable methods with moderate deposition conditions.…”
Section: Figurementioning
confidence: 99%
“…Advances have been achieved by theoretically and experimentally exploring ReC x and ReN x compounds. Further investigation of ReN x compounds [7][8][9][10][11] drove the field toward the synthesis of Re 2 N [7], Re 3 N, ReN 3 [9], the prediction of ReN 2 [8] and its synthesis [9]. In parallel, ReC x have been explored through the synthesis of Re 2 C [12] and quantum-chemical calculations of ReC 2 [13].…”
Section: Introductionmentioning
confidence: 99%