Lithiation of a series of aryl benzyl ethers containing fluorine atoms or CF 3 − group in the phenolic ring has been studied. It was found that the long-distance inductive effect (two fluorine atoms in 2,6-or 2,3-position to the oxygen) and the cooperation of the coordination and inductive effects (fluorine atom or CF 3 − group meta to oxygen atom) are the main factors directing ortholithiation. Dilithiation of aryl benzyl ethers by butyllithium is generally less effective, but in the presence of PMDTA occurs efficiently and gives compounds containing lithium atoms at the phenyl ring and in the benzylic position. 2,3-Difluoro-benzyloxybenzene was dilithiated using BuLi-PMDTA complex and the intermediate was trapped with Me 3 SiCl to give disilylated product in high yield.