Synthesis of ion conducting LixAlySizO thin films by atomic layer deposition

Perng, Ya-Chuan; Cho, Jea; Sun, Steven Y.; Membreno, Daniel; Cirigliano, Nicolas; Dunn, Bruce; Chang, Jane P.

doi:10.1039/c3ta14928e

Cited by 72 publications

(76 citation statements)

References 49 publications

(35 reference statements)

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“…The XRD diffractograms matched well with the reported peak positions of Li0.33La0.557TiO3, however four peaks could not be identified [120]. LixAlySizO, another amorphous solid electrolyte, has been studied by Perng et al [121]. The material belongs to the lithium aluminosilicate family, which includes materials with high lithiumion conductivities with various metal ratios [30].…”

Section: Methodssupporting

confidence: 69%

“…[123] but it most likely originates from different starting surfaces. A 50 nm Li x Al y S film was measured to have a room temperature ionic conductivity of 2.5 × 10 −7 S/cm, which is among the best quoted conductivities of ALD-made films [108,109,117,121,123]. The sulphide was studied as an artificial SEI-layer on metallic Li and it was found to effectively stabilize the interface between the metal anode and an organic liquid electrolyte [123].…”

Section: Methodsmentioning

confidence: 99%

“…Li x Al y Si z O, another amorphous solid electrolyte, has been studied by Perng et al [121]. The material belongs to the lithium aluminosilicate family, which includes materials with high lithium-ion conductivities with various metal ratios [30].…”

Section: Methodsmentioning

confidence: 99%

“…The material belongs to the lithium aluminosilicate family, which includes materials with high lithium-ion conductivities with various metal ratios [30]. Lithium aluminosilicate was deposited by ALD using a pulsing sequence of Al 2 O 3 from TMA and water, Li 2 O/LiOH from LiO t Bu and water and SiO 2 from TEOS and water [121]. With a pulsing sequence of Al:Li:Si = 10:6:4 the film thickness increased linearly with the number of supercycles.…”

Section: Methodsmentioning

confidence: 99%

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Metal Fluorides as Lithium-Ion Battery Materials: An Atomic Layer Deposition Perspective

2018

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Lithium-ion batteries are the enabling technology for a variety of modern day devices, including cell phones, laptops and electric vehicles. To answer the energy and voltage demands of future applications, further materials engineering of the battery components is necessary. To that end, metal fluorides could provide interesting new conversion cathode and solid electrolyte materials for future batteries. To be applicable in thin film batteries, metal fluorides should be deposited with a method providing a high level of control over uniformity and conformality on various substrate materials and geometries. Atomic layer deposition (ALD), a method widely used in microelectronics, offers unrivalled film uniformity and conformality, in conjunction with strict control of film composition. In this review, the basics of lithium-ion batteries are shortly introduced, followed by a discussion of metal fluorides as potential lithium-ion battery materials. The basics of ALD are then covered, followed by a review of some conventional lithium-ion battery materials that have been deposited by ALD. Finally, metal fluoride ALD processes reported in the literature are comprehensively reviewed. It is clear that more research on the ALD of fluorides is needed, especially transition metal fluorides, to expand the number of potential battery materials available.

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Section: Methodssupporting

confidence: 69%

Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

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Metal Fluorides as Lithium-Ion Battery Materials: An Atomic Layer Deposition Perspective

2018

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“…To investigate the electrochemical oxidation process, a solid-state in situ microbattery, consisting of an MWCNT/Li 2 O 2 positive electrode (pre-discharged galvanostatically to a condition forming discs) and a Si nanowire (delithiated) negative electrode coated with LiAlSiO x solid electrolyte (SE) [80], was assembled and then placed inside a TEM. [21].…”

Section: Electronic Charging Limitations At Highmentioning

confidence: 99%

The Kinetics and Product Characteristics of Oxygen Reduction and Evolution in LiO2 Batteries

Gallant

Mitchell

et al. 2014

The Lithium Air Battery

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Lithium-oxygen (Li-O 2 ) batteries are attractive for future energy storage devices because of their projected several-fold increase in gravimetric energy compared to lithium-ion batteries [1,2]. Combining operational elements of a fuel cell (e.g., reduction of gaseous O 2 from the environment during discharge) with that of a battery (storage of electrons and Li + within a solid phase, Li 2 O 2 ), Li-O 2 systems represent a departure from conventional constraints of Li-ion positive electrode development. Specifically, the necessity of using intercalation structures with heavy transition metals is removed, with the theoretical gravimetric or volumetric energy of the Li-O 2 electrode limited not by properties of an intercalation compound but by the ability to efficiently fill the electrode void volume with the newly formed phase, Li 2 O 2 . It is from this fundamental difference that Li-O 2 cells are largely expected to derive their gravimetric energy advantage.Li-O 2 batteries face substantial challenges that currently limit their practical applications, including poor stability of the carbon electrode and electrolyte solvent

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