Synthesis of highly oriented, single-crystal silicon nanoparticles in a low-pressure, inductively coupled plasma

Bapat, Ameya; Perrey, Christopher R.; Campbell, S. A.; Carter, C. Barry; Kortshagen, Uwe R.

doi:10.1063/1.1586957

Cited by 73 publications

(53 citation statements)

References 36 publications

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“…For particles with an average size of 3 nm, which is typical for the obtained nanoparticles from the above experiments, the peak temperature could be as high as 700-800 K, sufficient to crystallize the small silicon nanoparticles. However, silicon nanocrystals as large as 100 nm could also be obtained, [112,114] which could not be explained by the above mechanism. Hydrogen [92,98,111,113] or argon [95,114,115] dilution is usually used for crystalline nanoparticle formation.…”

Section: Particle Dispersion and Crystallinitymentioning

confidence: 81%

“…However, silicon nanocrystals as large as 100 nm could also be obtained, [112,114] which could not be explained by the above mechanism. Hydrogen [92,98,111,113] or argon [95,114,115] dilution is usually used for crystalline nanoparticle formation. It is well known that hydrogen causes the transition from amorphous silicon to microcrystalline silicon.…”

Section: Particle Dispersion and Crystallinitymentioning

confidence: 81%

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Plasma‐Assisted Approaches in Inorganic Nanostructure Fabrication

et al. 2010

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Plasma is a unique medium for chemical reactions and materials preparations, which also finds its application in the current tide of nanostructure fabrication. Although plasma-assisted approaches have been long used in thin-film deposition and the top-down scheme of micro-/nanofabrication, fabrication of zero- and one-dimensional inorganic nanostructures through the bottom-up scheme is a relatively new focus of plasma application. In this article, recent plasma-assisted techniques in inorganic zero- and one-dimensional nanostructure fabrication are reviewed, which includes four categories of plasma-assisted approaches: plasma-enhanced chemical vapor deposition, thermal plasma sintering with liquid/solid feeding, thermal plasma evaporation and condensation, and plasma treatment of solids. The special effects and the advantages of plasmas on nanostructure fabrication are illustrated with examples, emphasizing on the understandings and ideas for controlling the growth, structure, and properties during plasma-assisted fabrications. This Review provides insight into the utilization of the special properties of plasmas in nanostructure fabrication.

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Section: Particle Dispersion and Crystallinitymentioning

confidence: 81%

Section: Particle Dispersion and Crystallinitymentioning

confidence: 81%

Plasma‐Assisted Approaches in Inorganic Nanostructure Fabrication

et al. 2010

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“…In addition, the IL is possible to be used as a flexible substrate for synthesizing SiQDs in low-pressure plasma, since the Si sputtering [269,270], and the decomposition of Si-containing gas or liquid precursors [271][272][273][274][275][276] are feasible.…”

Section: Semiconductorsmentioning

confidence: 99%

A review of plasma–liquid interactions for nanomaterial synthesis

Chen¹,

Li²,

Li³

2015

J. Phys. D: Appl. Phys.

302

225

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Over the past decades, a new branch of plasma research, the nanomaterial (NM) synthesis by plasma-liquid interactions (PLIs), is rapidly rising, mainly due to the recently developed various plasma sources operated from low to atmospheric pressures. The PLIs provide novel plasma-liquid interfaces where many physical and chemical processes take place. By exploiting these physical and chemical processes, various NMs ranging from noble metal nanoparticles to graphene nanosheets can be easily synthesized. The currently rapid development and increasingly wide utilization of the PLI method naturally lead to an urgent requirement for presenting a general review. This paper reviews the current status of research on plasma-liquid 2 interactions for nanomaterial syntheses. Focus is on the comprehensive understanding of the synthesis process and perceptive opinions on the present issues and future challenges in this subject.

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“…An important observation made was that these particles were found to be polycrystalline. The polycrystalline nature of the pseudocubes was related to the fact that nucleation of hematite occurs at the akaganeite interface, and a model for the formation mechanism was developed based on Debye-Huckel theory [25].Given the importance of single crystal nanoparticles for various applications and the fact that the characterization of typical materials properties is generally easier for single crystal particles [26][27][28][29], we thus started an investigation of the formation hematite particles at low FeCl 3 concentrations (0.01-0.1 M). Moreover, in our attempt to achieve full control over the nanostructure of hematite particles we extended this study also to an investigation of the influence of the size and concentration of the metastable akaganeite precursor particles on the crystallinity and size of the final hematite particles.…”

Section: Introductionmentioning

confidence: 99%