Synthesis of functional diamond-like carbon nanocomposite films containing titanium dioxide nanoparticles

Chen, Kuo Cheng; Hong, Franklin Chau Nan

doi:10.1016/j.tsf.2010.04.102

Cited by 4 publications

(2 citation statements)

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“…It can be applied to any type of substrate such as plastics, glass, metal, ceramics and an opaque substrate. Up to now, several studies had previously used titanium‐containing organometallic precursors such as titanium tetraisopropoxide (TTIP) and titanium ethoxide (TEO) to deposit TiO containing DLC films by plasma‐enhanced chemical vapor deposition (PECVD) 13–20. The as‐deposited TiO containing DLC films could be fabricated with slight conductivity13 or could be post‐annealed with photocatalytic activities 17.…”

Section: Introductionmentioning

confidence: 99%

“…Without UV irradiation, the TiO 2 ‐DLC films displayed an increasing bacterial affinity with increasing the TiO 2 content, but, under UV light irradiation, their antibacterial activity increased with TiO 2 content. Besides, the mechanical and hydrophilic properties of the DLC nanocomposite films were improved by incorporating TiO 2 nanoparticles via a high degree of gas phase reaction of TiO x clusters 18–20, 23. The TiO 2 ‐DLC film exhibited a hydrophilic surface after UV light irradiation 18, 20…”

Section: Introductionmentioning

confidence: 99%

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Deposition of Titania‐containing Diamond‐like Carbon Nanocomposite Films by Sputtering‐assisted Chemical Vapor Deposition

Chen

Hong

Jeng

2011

Plasma Processes & Polymers

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Titania‐containing diamond‐like carbon (DLC) nanocomposite films were prepared by sputtering‐assisted plasma chemical vapor deposition. With titanium‐oxygen species sputtered from titania (TiO2) target by argon using a radio‐frequency (RF) power, DLC films were simultaneously grown on the negatively‐biased substrate by plasma chemical vapor deposition of acetylene gas using a pulsed direct‐current (DC) power. By adjusting the Ar/acetylene gas concentration, both TiO2 and TiC nanoparticles could be incorporated in the DLC films. TiO2 nanoparticles were mainly formed in the DLC matrix with TiO bond being the dominant bonding for Ti in the DLC films. Furthermore, the amount of TiO2 and TiC nanoparticles embedded in the DLC film increased with the increase of Ar concentration in the gas. The TiO2‐DLC nanocomposite films deposited at 80% Ar exhibited a high hardness of around 13 GPa at a relatively low stress and, particularly, a fast rate of turning super‐hydrophilic by reaching zero degree of water contact angle under 40 min of ultraviolet irradiation.

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Section: Introductionmentioning

confidence: 99%