1988
DOI: 10.1007/bf01729918
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Synthesis of fine AlN powder by vapour-phase reaction

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Cited by 43 publications
(11 citation statements)
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“…질화알루미늄(AlN)을 합성하는 방법으로는 열탄소 환 원 질화법(Cabothermal Reduction Method), 4,5) 직접 질화 법(Direct Nitridation Method), 6) 부유 질화법(Floating Nitridation), 7) 기상 반응법(Vapor Phase Nitridation), 8) 플라즈 마 반응법(Plasma Nitridation), 9) 자전 고온 반응 합성법(SHS, Self-propagating high temperature synthesis) 10…”
Section: -3)unclassified
“…질화알루미늄(AlN)을 합성하는 방법으로는 열탄소 환 원 질화법(Cabothermal Reduction Method), 4,5) 직접 질화 법(Direct Nitridation Method), 6) 부유 질화법(Floating Nitridation), 7) 기상 반응법(Vapor Phase Nitridation), 8) 플라즈 마 반응법(Plasma Nitridation), 9) 자전 고온 반응 합성법(SHS, Self-propagating high temperature synthesis) 10…”
Section: -3)unclassified
“…The production rate of AIN for this process is much higher in comparison with either carbothermal reduction or direct nitridation. 21 The process flowchart for vapour phase synthesis of AIN is shown in Fig. 8 and the reaction vessel is shown in Fig.…”
Section: Vapour Phase Synthesismentioning
confidence: 99%
“…In addition to these two routes, the gas-phase reaction of aluminium chloride and ammonia has been used for the preparation of aluminium nitride, in recent years [5]. All these synthesis routes are high-temperature processes, and the powders obtained have large crystallite sizes and hence low sinterability.…”
Section: Introductionmentioning
confidence: 99%