2021
DOI: 10.1021/acsanm.0c02930
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Synthesis of Diamond-like Carbon as a Dielectric Platform for Graphene Field Effect Transistors

Abstract: The platform for supporting two-dimensional (2D) materials such as graphene has a critical influence on the electronic properties of the materials it supports. Here we report on the filtered cathodic vacuum arc deposition (FCVAD) of atomically flat diamond-like carbon (DLC) films with varied C sp 3 /sp 2 content ratio by modulating the parameters of substrate bias voltage, then used as a dielectric platform for supporting graphene. By doing this, an all-carbon DLC−graphene heterostructure would be formed. Thro… Show more

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Cited by 8 publications
(11 citation statements)
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“…Examples of such cases include the formation of crystal defects, [ 71–73 ] increase in strain, [ 74–76 ] doping induced by chemi‐/physisorption. [ 69,77–80 ]…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…Examples of such cases include the formation of crystal defects, [ 71–73 ] increase in strain, [ 74–76 ] doping induced by chemi‐/physisorption. [ 69,77–80 ]…”
Section: Resultsmentioning
confidence: 99%
“…Examples of such cases include the formation of crystal defects, [71][72][73] increase in strain, [74][75][76] doping induced by chemi-/physisorption. [69,[77][78][79][80] In our physisorption, the nitrogen atom of the amine group (NH 2 ) in H 2 NC n interacts with the carbon atoms that form the SLG to generate new in-gap states. We conducted ab initio calculations to examine the creation of such energy states upon physisorption of the amine molecules on SLG, and what factors do and do not influence the states.…”
Section: Noncovalent-contact-induced Gap Statesmentioning
confidence: 99%
“…Diamond-like films, obtained by the cathodic vacuum arc deposition method, were used as a dielectric platform to support GN [126]. The GN deposited on these films revealed improved FET carrier mobility compared with GN on SiO 2 /Si substrate due to the significant suppression of the doping.…”
Section: Nanoelectronic and Spintronic Platformsmentioning
confidence: 99%
“…Finally, in recent years there have been many reports of using 2D nanomaterials for ultrasensitive diagnosis of diseases ( Zhu et al, 2015 ). Due to its excellent intrinsic electrical and mechanical properties ( Hao et al, 2018 ; Wang C. et al, 2020 ), graphene has emerged as the most promising functional material ( Luo et al, 2021 ). To data, graphene-based biosensors have been reported to detect a wide range of biomolecules including nucleic acids ( Wang et al, 2019a ), proteins ( Tang et al, 2018 ; Hao Z. et al, 2019 ), and small molecules ( Wang et al, 2019b ; Li et al, 2019c ).…”
Section: Application Of Paper-based Poc Tests For Covid-19mentioning
confidence: 99%