1992
DOI: 10.1038/355714a0
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Synthesis of dense silicon-based ceramics at low temperatures

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Cited by 330 publications
(183 citation statements)
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“…As previously reported, the size and distribution of the pores of the PDCs depend on the precursor and the pyrolysis condition. 38 The volatilization of large organic molecules or oligomers causes the formation of defects such as pores and cracks, while the mass loss of the material caused by the thermal decomposition during pyrolysis is leading to shrinkage of the ceramic in comparison to the green body. The decomposition products from the SiBCN material during the main step in the mass loss from 400 to 650c C were relatively small molecules, methane and hydrogen, and the thin film was densified by the further pyrolysis up to 1100c C Fig.…”
mentioning
confidence: 99%
“…As previously reported, the size and distribution of the pores of the PDCs depend on the precursor and the pyrolysis condition. 38 The volatilization of large organic molecules or oligomers causes the formation of defects such as pores and cracks, while the mass loss of the material caused by the thermal decomposition during pyrolysis is leading to shrinkage of the ceramic in comparison to the green body. The decomposition products from the SiBCN material during the main step in the mass loss from 400 to 650c C were relatively small molecules, methane and hydrogen, and the thin film was densified by the further pyrolysis up to 1100c C Fig.…”
mentioning
confidence: 99%
“…The system of Si 3 B 3 C 3 N 4 corresponds to the one where a part of N atoms in Si 3 B 3 N 7 are replaced by carbon atoms. To create an initial structure for MD, a random mixture with a composition of Si 3 N 4 , Si 3 B 3 N 7 or Si 3 B 3 C 3 N 4 in a cubic simulation box was generated, where the density was 2.5 g/cm 3 . This is because several experimental studies of precursor-derived amorphous Si 3 N 4 -based materials showed a density of around 2.5 g/cm 3 .…”
Section: Computational Proceduresmentioning
confidence: 99%
“…To create an initial structure for MD, a random mixture with a composition of Si 3 N 4 , Si 3 B 3 N 7 or Si 3 B 3 C 3 N 4 in a cubic simulation box was generated, where the density was 2.5 g/cm 3 . This is because several experimental studies of precursor-derived amorphous Si 3 N 4 -based materials showed a density of around 2.5 g/cm 3 . The system of Si 3 N 4 contains 896 atoms, while those of Si 3 B 3 N 7 and Si 3 B 3 C 3 N 4 have 832 atoms.…”
Section: Computational Proceduresmentioning
confidence: 99%
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“…[4][5][6] Bulk amorphous ceramics such as Si-C-N and Si-B-C-N have been developed by pyrolyzing the isostatically pressed and warm pressed preceramic powders. [7][8][9][10][11] However, it is difficult to fabricate no porosity ceramic monoliths by these processes since porosity is necessary to remove the gas species during pyrolysis.…”
Section: Introductionmentioning
confidence: 99%