Synthesis of Carbon Nanotubes on Suspending Microstructures by Rapid Local Laser Heating

Ruan, Wenzhou; Wang, Zheyao; Li, Jie; Jiang, Kaili; Liu, Litian

doi:10.1109/jsen.2011.2161280

Cited by 12 publications

(6 citation statements)

References 8 publications

(7 reference statements)

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“…The as-grown uniform and foam-like CNTs possess potential in sensor applications. 84 Recently, continuous wavelength CO 2 laser-assisted CVD has been frequently used to synthesize CNT films on a silicon substrate. 156 This process may have beneficial applications in fabricating CNT sensors on integrated circuits for improved performance.…”

Section: Chemical Vapor Depositionmentioning

confidence: 99%

“…With particle size around a few nm, SWNTs are formed and the particles larger than 10 nm favour the formation of MWNTs. 63 Many CVD alternatives have been established, including fixed beds, [64][65][66][67][68] fluidized beds, 7,69-73 aerosols, [74][75][76] floating catalysts, [77][78][79] and combination methods [80][81][82][83][84] such as plasmaenhanced 80,81 and laser-assisted CVD techniques. [82][83][84] The hybrid systems combining CVD, laser ablation and arc discharge are capable of improving the quality and yield in contrast to conventional CVD techniques.…”

Section: Chemical Vapor Depositionmentioning

confidence: 99%

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Carbon nanotube catalysts: recent advances in synthesis, characterization and applications

et al. 2015

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Carbon nanotubes are promising materials for various applications. In recent years, progress in manufacturing and functionalizing carbon nanotubes has been made to achieve the control of bulk and surface properties including the wettability, acid-base properties, adsorption, electric conductivity and capacitance. In order to gain the optimal benefit of carbon nanotubes, comprehensive understanding on manufacturing and functionalizing carbon nanotubes ought to be systematically developed. This review summarizes methodologies of manufacturing carbon nanotubes via arc discharge, laser ablation and chemical vapor deposition and functionalizing carbon nanotubes through surface oxidation and activation, doping of heteroatoms, halogenation, sulfonation, grafting, polymer coating, noncovalent functionalization and nanoparticle attachment. The characterization techniques detecting the bulk nature and surface properties as well as the effects of various functionalization approaches on modifying the surface properties for specific applications in catalysis including heterogeneous catalysis, photocatalysis, photoelectrocatalysis and electrocatalysis are highlighted.

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Section: Chemical Vapor Depositionmentioning

confidence: 99%

Section: Chemical Vapor Depositionmentioning

confidence: 99%

Carbon nanotube catalysts: recent advances in synthesis, characterization and applications

et al. 2015

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“…Using a focused CO 2 laser, Ruan et al 123 grew forests of CNTs directly on small suspended structures. They succeeded in growing tens of nanometers thick MWNTs on suspended silicon microstructures smaller than the laser spot-size using iron as catalyst.…”

Section: Local Aligned Growthmentioning

confidence: 99%

Laser-assisted growth of carbon nanotubes—A review

Burgt

2014

Journal of Laser Applications

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Laser-assisted chemical vapor deposition (LACVD) is an attractive maskless process for growing locally carbon nanotubes at selected places on substrates that may contain temperature-sensitive components. This review gives a comprehensive overview of the reported research with respect to laser assisted CVD for the growth of carbon nanotubes. The advantages and disadvantages of local growth using laser sources are discussed, with a focus on structural quality and properties, such as length, position and alignment, and process control. The paper is divided into two parts. The first part deals with the influence that the main parameters for nanotube growth-gas, catalyst and thermal energyhave on the growth of carbon nanotubes by laser-assisted synthesis. The second part deals with the attempts and successes to control different aspects of local nanotube growth using a laser-assisted growth method. V

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“…The LCVD for CNT growth is a custom-built system [44]. It consists of a quartz tube as the reaction chamber, a CO 2 laser with wavelength of 10.6 μm as the heating source, a moving stage to control the position of the substrate, a gas supply system for providing the reaction gases, and a vacuum pump for pressure control, as shown in Fig.…”

Section: B Cnt Synthesismentioning

confidence: 99%

“…By exploiting these advantages, we previously proposed the idea of using LCVD for localized synthesis of not-aligned CNTs on suspended microstructures [44]. In this study, we further investigated LCVD synthesis of CNTs on suspended microstructures and presented some new results.…”

Section: Introductionmentioning

confidence: 98%

Localized Synthesis of Carbon Nanotube Films on Suspended Microstructures by Laser-Assisted Chemical Vapor Deposition

Ruan

Wang

2013

IEEE Trans. Nanotechnology

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A laser-assisted chemical vapor deposition (LCVD) method has been developed for in situ synthesis of carbon nanotube (CNT) films on suspended microstructures. Focused laser beams are used to heat locally the suspended microstructures with low thermal mass and low thermal dissipation to high temperatures for localized CNT growth. Other substrate areas than the microstructures remain at low temperatures, preventing the devices on the substrate from being destroyed by high temperatures. The synthesizing parameters and the influences on CNT morphology and structures are systematically investigated and optimized, and solutions for uniform temperature distribution are proposed. Upon optimization, uniform, localized, and rapid growth of CNT synthesis has been achieved on suspended microstructures, and aligned CNTs with length and uniformity comparable to conventional hot-wall CVD have been successfully obtained. The experimental results show LCVD is a promising technology for in situ and localized synthesis of CNT films on suspended microstructures for CNT-CMOS (complementary metal oxide semiconductor) integration.Index Terms-Carbon nanotube (CNT), complementary metal oxide semiconductor (CMOS), integration, laser, microstructure.

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Synthesis of Carbon Nanotubes on Suspending Microstructures by Rapid Local Laser Heating

Cited by 12 publications

References 8 publications

Carbon nanotube catalysts: recent advances in synthesis, characterization and applications

Carbon nanotube catalysts: recent advances in synthesis, characterization and applications

Laser-assisted growth of carbon nanotubes—A review

Localized Synthesis of Carbon Nanotube Films on Suspended Microstructures by Laser-Assisted Chemical Vapor Deposition

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