J. Phys.: Conf. Ser.
 2018
DOI: 10.1088/1742-6596/1115/3/032095
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Synthesis of amorphous hydrogenated carbon (a-C:H) films on Germanium by the use of the linear anode layer source

Alexander Zolkin
1
,
Anna Semerikova
2
,
Sergey Chepkasov
3
et al.
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