1989
DOI: 10.1007/bf01015824
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Synthesis of ammonia in high-frequency discharges

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Cited by 92 publications
(121 citation statements)
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“…2 and 3, we must first allow for the production routes of NH 3 other than the surface reactions on the membrane-like catalyst. It has been previously substantiated that NH 3 formation in the plasma phase of N 2 -H 2 was progressed by reactions of NH radicals with hydrogen [4,6,7]. Kiyooka and Matsumoto [10] have also elucidated that large amounts of NH x radicals were produced on the surface of the stainless-steel wall of the ECR chamber as a catalyst.…”
Section: Ammonia Formation In the Plasma Reactor Without The Membranementioning
confidence: 94%
See 1 more Smart Citation
“…2 and 3, we must first allow for the production routes of NH 3 other than the surface reactions on the membrane-like catalyst. It has been previously substantiated that NH 3 formation in the plasma phase of N 2 -H 2 was progressed by reactions of NH radicals with hydrogen [4,6,7]. Kiyooka and Matsumoto [10] have also elucidated that large amounts of NH x radicals were produced on the surface of the stainless-steel wall of the ECR chamber as a catalyst.…”
Section: Ammonia Formation In the Plasma Reactor Without The Membranementioning
confidence: 94%
“…In the Haber process, dissociative adsorption of N 2 , which has been accepted to be the rate-determining step, is carried out on promoted iron catalysts at high temperatures and pressures [1,2]. It is well known that efficient activation of N 2 at ambient conditions can be achieved by low-temperature plasmas; therefore, a number of studies on plasma synthesis of ammonia have been undertaken [3][4][5][6][7][8][9][10][11][12][13].…”
Section: Introductionmentioning
confidence: 99%
“…The ammonia production was ascribed to the surface reaction of NH x radicals adsorbed on the zeolite with hydrogen atoms. 14 The formation of ammonia in plasmas is still not completely understood but it is assumed that plasma-surface interactions play an important role. The formation of ammonia is generally ascribed to stepwise addition reactions between adsorbed nitrogen and hydrogen containing radicals at the surface and incoming N and H containing radicals.…”
Section: Introductionmentioning
confidence: 99%
“…Plasmas containing nitrogen and hydrogen are also extensively studied because of their widespread applications in research and industrial environments. The plasmas are used for the chemical synthesis of ammonia, 9,11,14 nitriding of materials, 17 the deposition of amorphous silicon nitride ͑a-SiN x :H͒ films for solar cell applications, 19 the plasma-assisted atomic layer deposition of TiN thin films, 20 and the etching of organic low k films. 21 Previously, we have shown that ammonia can be formed efficiently in plasmas generated from mixtures of nitrogen and hydrogen via plasma-activated catalysis.…”
Section: Introductionmentioning
confidence: 99%
“…In high-frequency discharges it was reported in 1989 that zeolite added to the downstream plasma facilitated the ammonia production, which was ascribed to NH x radicals adsorbed on the zeolite. 2 We propose a different way of generating ammonia, i.e., via plasma-activated catalysis. In this process fluxes of hydrogen and nitrogen radicals are produced in a high density plasma source with high dissociation degree.…”
mentioning
confidence: 99%