“…Safety concerns for radioactive UO 2 limit the available deposition methods to magnetron sputtering (MS), − chemical vapor deposition (CVD), , and polymer-assisted deposition (PAD). , MS allows deposition of films with preferred crystallographic orientation on selected single-crystalline substrates ,− ,− and requires high-vacuum instrumentation and special handling conditions for pyrophoric metallic uranium as a source material. The CVD method uses toxic volatile organouranium precursors. ,, Films exhibit good adhesion to substrates, but they often contain other oxides of uranium. The PAD method uses a solution of uranyl nitrate and polyethylenimine to be deposited by spin coating. ,,, Further burning off the organic residues and obtaining crystalline UO 2 require a slow (1 °C/min) heating to high temperatures (1000 °C).…”