Synthesis for tunable dual behavior resonator

Prigent, Gaëtan; Vu, Thanh Mai; Plana, R.

doi:10.1109/apmc.2009.5385338

Cited by 2 publications

(4 citation statements)

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“…and I the moment of inertia is defined in Equation (10). In this case, ∆z = 3.7 − 1.5 = 2.2 µm, so the stress gradient σ calculated here is equal to 14.28 MPa.…”

Section: Actuation Voltage Measurementsmentioning

confidence: 99%

“…This MEMS switch has ever been integrated in tunable resonator called modified -DBR [10] and fabricated on the same process. Three MEMS are placed in three stubs (Figure 17(a)) to control its lengths.…”

Section: Circuit Implementationmentioning

confidence: 99%

“…From the demand of the switch in tunable resonator synthesis, MEMS is used to change the lines lengths in a resonator [10]. A topology of an inline MEMS switch is chosen to facilitate MEMS integration in the circuit.…”

Section: Rf Mems Topologymentioning

confidence: 99%

“…The self-matched tunable resonator solution developed hereafter has been synthesized considering the C up and C down values for MEMS [10]. Thus, MEMS has to be designed to fit with criteria in the synthesis.…”

Section: Introductionmentioning

confidence: 99%

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Design and Fabrication of Rf-Mems Switch for v-Band Reconfigurable Application

Vu¹,

Prigent²,

Ruan³

et al. 2012

PIER B

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“…and I the moment of inertia is defined in Equation (10). In this case, ∆z = 3.7 − 1.5 = 2.2 µm, so the stress gradient σ calculated here is equal to 14.28 MPa.…”

Section: Actuation Voltage Measurementsmentioning

confidence: 99%

Section: Circuit Implementationmentioning

confidence: 99%

Section: Rf Mems Topologymentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations