2007
DOI: 10.1016/j.memsci.2006.12.034
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Synthesis, characterization and gas permeation properties of a silica membrane prepared by high-pressure chemical vapor deposition

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Cited by 73 publications
(50 citation statements)
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“…Although correction of Knudsen flow was made in this study, the activation energy without correlation was approximately the same as that without correction when the permeance ratio was greater than 100, due to the small contribution of permeation through large pores. Figure 8 shows the permeance ratio of He/H 2 as a function of the activation energy of H 2 for microporous silica membranes prepared by sol-gel, 17,22 CVD, 24,[47][48][49] and vitreous silica 9 using various materials including silica and silica composite oxides with Zr, Ni, and Co. It should be noted Table 1.…”
Section: Permeation Of Hydrogen Through Silica Membranesmentioning
confidence: 99%
“…Although correction of Knudsen flow was made in this study, the activation energy without correlation was approximately the same as that without correction when the permeance ratio was greater than 100, due to the small contribution of permeation through large pores. Figure 8 shows the permeance ratio of He/H 2 as a function of the activation energy of H 2 for microporous silica membranes prepared by sol-gel, 17,22 CVD, 24,[47][48][49] and vitreous silica 9 using various materials including silica and silica composite oxides with Zr, Ni, and Co. It should be noted Table 1.…”
Section: Permeation Of Hydrogen Through Silica Membranesmentioning
confidence: 99%
“…Experimentally, the super-conducting domains consist of pores with characteristic dimensions of the order of 1 nm or less. Silica films with a thickness of 30-100 nm accommodate these pores [28][29][30]. The gas molecules were found to selectively permeate thin film membranes via these pores, competing, in parallel, with Fickian transport in the poorly-diffusing domain [27].…”
Section: Introductionmentioning
confidence: 98%
“…The HT-CVD membrane showed a high hydrogen permeance on the order of 10 −7 mol m −2 s −1 Pa −1 with a H 2 /CH 4 selectivity above 1000 at 600 • C. The relatively high H 2 permeance and excellent selectivity of this CVD-derived silica membrane are due to its thinness (30-40 nm) and to a silica structure with pore sizes of about 0.3 nm. However, CVD-derived silica membranes show high hydrogen permselectivity but low hydrogen permeance, in general, because of the dense silica layer on a porous substrate [4][5][6][7][8][9][10].…”
Section: Introductionmentioning
confidence: 99%