2008
DOI: 10.1134/s0012500808010011
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Synthesis and thermal and photochemical transformations of carboxy-containing polyimide derivatives with norbornene side fragments

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“…In particular, we showed recently that the APIs with side methacrylate and 1,1,2,3,3 pentafluoro 1,6 heptadiene groups enable the design of negative pho toresists with high lithographic parameters [1,2]. However, the APIs known to date have insufficient solubility, which limits their application in microelec tronics.…”
mentioning
confidence: 99%
“…In particular, we showed recently that the APIs with side methacrylate and 1,1,2,3,3 pentafluoro 1,6 heptadiene groups enable the design of negative pho toresists with high lithographic parameters [1,2]. However, the APIs known to date have insufficient solubility, which limits their application in microelec tronics.…”
mentioning
confidence: 99%