Synthesis and structural characterization of highly 〈100〉-oriented {100}-faceted nanocrystalline diamond films by microwave plasma chemical vapor deposition

Tang, C. J.; Pereira, S.; Fernandes, A.J.S.; Neves, A.J.; Grácio, J.; Bdikin, Igor; Soares, M.R.; Fu, Lianshe; Gu, Leilei; Kholkin, A. L.; Carmo, M. C.

doi:10.1016/j.jcrysgro.2009.01.130

Cited by 12 publications

(11 citation statements)

References 41 publications

(60 reference statements)

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“…This rate is comparable with the reported in the literature [171,186] for similar parameters (4% methane and 800°C deposition temperature). Higher growth rates using MPCVD can be generally achieved by increasing the methane concentration (up to 7.2%) [171].…”

Section: Resultssupporting

confidence: 91%

Novel Single Photon Emitters Based on Color Centers in Diamond

Aharonovich¹,

Castelletto²,

Prawer³

2011

AIP Conference Proceedings

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Exploitation of emerging quantum technologies requires efficient fabrication of key building blocks. Single photon sources are one of these fundamental constituents that are presently pushing the bounds of existing materials and fabrication techniques. Color centers in diamond are very attractive in this respect since they are the only photostable solid-state single photon emitters operating at room temperature known to date.The Nitrogen-Vacancy (NV) complex is one example of such an optical center and has been subject to intensive research due to the availability of optical readout of its individual electronic spin state. However, the NV center has fundamental limitations: strong phonon coupling of the excited state which results in a broad photoluminescence spectrum (~ 100 nm) of which the zero-phonon line makes up only 4%. Emission of single photons in the zero phonon line is then extremely weak, typically on the order of a few thousands of photons per second. Such count rates are insufficient for the realization of advanced quantum information processing protocols.To move beyond the limitations of the NV there is an emerging need to identify and fabricate novel diamond based single photon emitters with improved photo-physical characteristics. Development of such emitters is the main goal of this thesis.We first concentrate on the recent progress in materials science and fabrication techniques of high quality nanodiamond crystals. We demonstrate the ability to grow high quality, submicron sized diamond crystals with a control over their final size and density using a microwave assisted chemical vapor deposition.We then study two methodologies to engineer diamond based single photon emitters in the grown nanodiamonds. In the first, nickel is implanted into the substrate onto which the nanocrystals are subsequently grown. During the diamond growth, the substrate is slightly etched and the nickel atoms diffuse and incorporate into the growing crystals. In the second we employ direct ion implantation of nickel into already deposited individual diamond nanocrystals. Optical and correlation spectroscopy measurements reveal that these methodologies are effective to fabricate nickel related single photon emitters, with zero phonon lines centered in the near infra-red and a short excited state lifetime (~3 ns).ii Furthermore, the ability of diamond to host various luminescence centers prompted the discovery of a new class of ultra bright single photon emitters. These new emitters found in diamond crystals grown on sapphire substrate and assigned to chromium, which is present in the substrate and incorporated into the crystal during the growth. Nanodiamonds hosting these centers deliver outstanding performance such as narrow photoluminescence in the near infra-red and ultra bright single photon emission with count rate of ~ 3.2×10 6 counts/s -the brightest single photon source known to date.Importantly, some of the emitters exhibit a photon statistics without any photon bunching at saturation, indicating a two-...

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Section: Resultssupporting

confidence: 91%

Novel Single Photon Emitters Based on Color Centers in Diamond

Aharonovich¹,

Castelletto²,

Prawer³

2011

AIP Conference Proceedings

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“…For micrometerthick columnar-structured films with a diameter of the cylindrical microstructure below 60 nm, it was shown that the lateral grain size of the h100i-oriented columns essentially did not increase with film thickness and the (100)-faceted films had a root-mean-square (rms) roughness of only $15 nm. 65 Typically, the roughness is 50-100 nm rms for NCD films. UNCD diamond with low surface roughness can also be deposited with the argon-rich CH 4 /Ar plasma chemistry, using very small quantities of hydrogen.…”

Section: E Nanocrystalline Diamondmentioning

confidence: 99%

The mechanical properties of various chemical vapor deposition diamond structures compared to the ideal single crystal

Hess

2012

Journal of Applied Physics

111

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Bias-enhanced nucleation and growth processes for improving the electron field emission properties of diamond films J. Appl. Phys. 111, 053701 (2012) Direct visualization and characterization of chemical bonding and phase composition of grain boundaries in polycrystalline diamond films by transmission electron microscopy and high resolution electron energy loss spectroscopy Appl. Phys. Lett. 99, 201907 (2011) Impurity impact ionization avalanche in p-type diamond Appl. Phys. Lett. 99, 202105 (2011) Ultrathin ultrananocrystalline diamond film synthesis by direct current plasma-assisted chemical vapor deposition J. Appl. Phys. 110, 084305 (2011) Diamond nanoparticles with more surface functional groups obtained using carbon nanotubes as sourcesThe structural and electronic properties of the diamond lattice, leading to its outstanding mechanical properties, are discussed. These include the highest elastic moduli and fracture strength of any known material. Its extreme hardness is strongly connected with the extreme shear modulus, which even exceeds the large bulk modulus, revealing that diamond is more resistant to shear deformation than to volume changes. These unique features protect the ideal diamond lattice also against mechanical failure and fracture. Besides fast heat conduction, the fast vibrational movement of carbon atoms results in an extreme speed of sound and propagation of crack tips with comparable velocity. The ideal mechanical properties are compared with those of real diamond films, plates, and crystals, such as ultrananocrystalline (UNC), nanocrystalline, microcrystalline, and homo-and heteroepitaxial single-crystal chemical vapor deposition (CVD) diamond, produced by metastable synthesis using CVD. Ultrasonic methods have played and continue to play a dominant role in the determination of the linear elastic properties, such as elastic moduli of crystals or the Young's modulus of thin films with substantially varying impurity levels and morphologies. A surprising result of these extensive measurements is that even UNC diamond may approach the extreme Young's modulus of singlecrystal diamond under optimized deposition conditions. The physical reasons for why the stiffness often deviates by no more than a factor of two from the ideal value are discussed, keeping in mind the large variety of diamond materials grown by various deposition conditions. Diamond is also known for its extreme hardness and fracture strength, despite its brittle nature. However, even for the best natural and synthetic diamond crystals, the measured critical fracture stress is one to two orders of magnitude smaller than the ideal value obtained by ab initio calculations for the ideal cubic lattice. Currently, fracture is studied mainly by indentation or mechanical breaking of freestanding films, e.g., by bending or bursting. It is very difficult to study the fracture mechanism, discriminating between tensile, shear, and tearing stress components (mode I-III fracture) with these partly semiquantitative methods. A nov...

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“…presented that the NCD film was synthesized using CH 4 /H 2 /O 2 /N 2 as the gas precursor with high growth rate of 2.6 μm/h [52]. The process used high microwave power of 3 kW and the substrate temperature at 700˚C.…”

Section: Microwave Plasma Chemical Vapor Depositionmentioning

confidence: 99%

Nanocrystalline Diamond Films Grown by Microwave Plasma Chemical Vapor Deposition and Its Biocompatible Property

Yang¹,

Zhang²

2018

AMPC

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Due to its unique properties such as high hardness, light transmittance, thermal conductance, chemical stability and corrosion resistance, diamond has drawn tremendous attention in last two decades. These specific properties made diamond film a promising material for cutting tools, microwave windows, heat sinks for electronic devices and diamond electrodes. However, the diamond film with grain sizes at microscale usually exhibits high surface roughness and hinders its applications in the microelectro mechanical system (MEMS) and biological field because it is difficult to be polished by mechanical and chemical methods. With the development of the chemical vapor deposition, the nanocrystalline diamond (NCD) film has been fabricated and found new applications. The grain size of NCD film is in the range of 10 to 100 nm, which inherits the properties of the diamond and possesses the unique properties of the nanoscale materials, and the morphology of the NCD film is granular or needle-like structure. The microwave plasma chemical vapor deposition (MPCVD) has been regarded as the most promising method to deposit NCD film at low temperature. Compared to the hot filament CVD, MPCVD can grow high quality NCD film avoiding of the contamination from the filament materials. The MPCVD technique has high plasma density to activate carbonaceous compound and grow NCD film in high growth rate and low substrate temperature. The unique properties of NCD film, such as the superior electrical, mechanical and biological properties facilitate their application in various fields. The biological application, especially as a biocompatible coating, mainly includes the joint replacement implants and protective coatings and the ophthalmological prosthesis.

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Synthesis and structural characterization of highly 〈100〉-oriented {100}-faceted nanocrystalline diamond films by microwave plasma chemical vapor deposition

Cited by 12 publications

References 41 publications

Novel Single Photon Emitters Based on Color Centers in Diamond

Novel Single Photon Emitters Based on Color Centers in Diamond

The mechanical properties of various chemical vapor deposition diamond structures compared to the ideal single crystal

Nanocrystalline Diamond Films Grown by Microwave Plasma Chemical Vapor Deposition and Its Biocompatible Property

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