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2019
DOI: 10.1021/acs.inorgchem.9b01204
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Synthesis and Properties of Branched Hydrogenated Nonasilanes and Decasilanes

Abstract: Branched higher silicon hydrides Si n H2n+2 with n > 6 were recently found to be excellent precursors for the liquid phase deposition of silicon films. Herein we report the gram-scale synthesis of the novel nona- and decasilanes (H3Si)3Si­(SiH2) n Si­(SiH3)3 (2: n = 1, 5: n = 2) from (H3Si)3SiLi and Cl­(SiPh2) n Cl by a combined salt elimination/dephenylation/hydrogenation approach. Structure elucidation of the target molecules was performed by NMR spectroscopy and X-ray crystallography. 2 and 5 are nonpyropho… Show more

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Cited by 12 publications
(20 citation statements)
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References 35 publications
(33 reference statements)
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“…The higher homologues of these compounds are seldom used, since they are difficult to handle and pyrophoric. However, the chemistry of hydridosilanes has received a considerable revival in recent years due to their potential use as precursors for liquid phase deposition of silicon films . This approach promises significant reduction of processing costs in the manufacture of semiconductor devices .…”
Section: Introductionmentioning
confidence: 99%
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“…The higher homologues of these compounds are seldom used, since they are difficult to handle and pyrophoric. However, the chemistry of hydridosilanes has received a considerable revival in recent years due to their potential use as precursors for liquid phase deposition of silicon films . This approach promises significant reduction of processing costs in the manufacture of semiconductor devices .…”
Section: Introductionmentioning
confidence: 99%
“…However, the chemistry of hydridosilanes has received a considerable revival in recent years due to their potential use as precursors for liquid phase deposition of silicon films. [4][5][6][7][8][9][10][11][12][13][14][15][16] This approach promises significant reduction of processing costs in the manufacture of semiconductor devices. [4,17,18,19] Printing techniques have been applied to produce silicon thin-film transistors (TFT).…”
Section: Introductionmentioning
confidence: 99%
“…Boron (e.g., decaborane [12]) forms chains with itself, and in an alternation with carbon, nitrogen, or oxygen (heteroatoms), but forms clusters of atoms rather than smaller isolated molecules (a problem which is opposite to sulfur). Carbon (e.g., decane isomer) and silicon (e.g., decasilane isomer [15]), on the other hand, form chains with themselves, form chains in alternation with various heteroatoms, and can form diverse linear or branched structures. Out of the possible alternative scaffolding elements, silicon appears to be the most promising choice as a substituent for carbon in biochemistry.…”
Section: Chemical Diversitymentioning
confidence: 99%
“…Silanes (silicon analogues of hydrocarbons), both branched and unbranched [15], and diverse cyclosilanes (e.g., cyclohexasilane) are commonly known silicon analogues of hydrocarbons [36]. Polymeric siloxenes (cyclosilane rings with attached -OH groups) have no direct carbon analogue, but are reminiscent of functionalized graphenes [37].…”
Section: Observed Functional Diversity Of Silicon Chemistrymentioning
confidence: 99%
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