We have prepared the Ho-substituted bismuth titanate (Bi 3.4 Ho 0.6 Ti 3 O 12 , BHT) thin films on Pt/Ti/SiO 2 /Si substrates using sol-gel method. The crystal structure and morphology of the films were characterized using X-ray diffraction and atomic force microscopy. The BHT film shows a single phase of Bi-layered Aurivillius structure and dense microstructure. The 2Pr and 2Ec of the 600-nm-thick BHT film were 38.4 μC/cm 2 and 376.1 kV/cm, respectively at applied electric field 500 kV/cm. The dielectric constant and dielectric loss are about 310 and 0.015 at a frequency of 1 MHz, respectively. The Pr value decreased to 93% of its pre-fatigue values after 4.46×10 9 switching cycles at 1 MHz frenquency, and the BHT film shows good insulating behavior according to the test of leakage current.Bi 3.4 Ho 0.6 Ti 3 O 12 thin film, sol-gel method, ferroelectric property, fatigue, dielectric constant