Synthesis and control of micro to noanscale porous structures of diamond like carbon films

Abstract

Diamond like carbon (DLC) films are synthesized on various substrates using a pulsed KrF excimer laser ablation deposition technique. Variations of laser power density, substrate temperature, angle and distance between the substrate and target yield different sizes of porous surfaces of DLC films. Microscope is used to examine the surfaces. Raman scattering is used to characterize the samples, and the typical G and D bands have been identified. Intensities and profiles of the G and D bands closely depend on laser power density. The relationship between the deposition rate and the power density is also studied.Keyword: pulsed laser beam, porous structure, diamond like carbon films Mater. Res. Soc. Symp. Proc. Vol. 954