Syntesis of Carbon Nanostructures Near Room Temperature Using Microwave PECVD

Structural‐mechanical and biomedical surface properties of elastic polyurethane after PECVD of Ar/C2H2

“…Note, that similar structures were obtained on a copper substrate by PECVD of acetylene at the initial stage of coating growth. 24 The stiffness of the surfaces (Figure 3, bottom row) has inhomogeneous granular structure (Figure 3(a)-(c)), which becomes less pronounced for 10 min if treatment (Figure 3(d)). The local contrast of the stiffness at short treatment (region "A" in Figure 3(a)) is related to the initial substrate: flat areas of the untreated PU (Figure 2(a)) correspond to the soft phase with low modulus.…”

Low Energy Implantation of Carbon into Elastic Polyurethane

“…On the nano-scale (see inserts in Figures 7 and 8) at U ≤ 0.5 keV, mesh-like nanostructure covers the surfaces. In the literature, one can find analogues of similar structures formed at the initial stage of carbon-like coating growth [14]. Ion implantation breaks almost all fibrillar structures of the hard phase.…”

One-Dimensional Carbon Nanostructures—From Synthesis to Nano-electromechanical Systems Sensing Applications—

“…(31)(32)(33)(34)(35)(36) It is especially attractive because it enables CNT deposition on temperaturesensitive substrates and exhibits compatibility with device fabrication processes. (14) Furthermore, owing to the high deposition rate of PECVD, the structures can be formed in a short time, which is of interest from the industrial viewpoint.…”

“…(14) Furthermore, owing to the high deposition rate of PECVD, the structures can be formed in a short time, which is of interest from the industrial viewpoint. (32) Some studies have revealed that PECVD is able to grow CNTs at 120 °C using nickel as a catalyst in a C 2 H 2 /NH 3 system (33) and nickel and copper as catalysts in a C 2 H 2 /Ar system. (32) The low-temperature processing is possible since high-energy electrons (3-4 eV) supply the energy needed for chemical reactions in the gas or plasma phase while the gas itself is relatively cool (27-227 °C).…”

“…(32) Some studies have revealed that PECVD is able to grow CNTs at 120 °C using nickel as a catalyst in a C 2 H 2 /NH 3 system (33) and nickel and copper as catalysts in a C 2 H 2 /Ar system. (32) The low-temperature processing is possible since high-energy electrons (3-4 eV) supply the energy needed for chemical reactions in the gas or plasma phase while the gas itself is relatively cool (27-227 °C). (34) More recently, PECVD has been investigated for its ability to produce vertically aligned nanotubes.…”