Synergic Strategies of Composition-Modified Bilayer Channel Configuration and Ozone-Processed Gate Stacks for Atomic-Layer Deposited In-Ga-Zn-O Thin-Film Transistors

Bae, Soo Hyun; Moon, Seo Hyun; Kwon, Young Se; Seong, Nak-Jin; Choi, Kyu-Jeong; Yoon, Sung Min

doi:10.2139/ssrn.3971412

SSRN Journal

2021

DOI: 10.2139/ssrn.3971412

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Synergic Strategies of Composition-Modified Bilayer Channel Configuration and Ozone-Processed Gate Stacks for Atomic-Layer Deposited In-Ga-Zn-O Thin-Film Transistors

Soo Hyun Bae¹,

Seo Hyun Moon²,

Young Se Kwon³

et al.

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Synergic Strategies of Composition-Modified Bilayer Channel Configuration and Ozone-Processed Gate Stacks for Atomic-Layer Deposited In-Ga-Zn-O Thin-Film Transistors

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