Synchrotron radiation assistant MOCVD deposition of ZnO films on Si substrate

Development of prototype apparatus for creating ZnO at low temperatures using diethyl zinc and O−plasmas

“…On the basis of these observations, DEZn is employed in the present research. Several studies using DEZn have been reported in research fields of metal-organic chemical vapor deposition (MOCVD) [20][21][22][23][24] and remote-plasma-enhanced MOCVD. 25) Although the setups used in those experiments were almost similar to ours as described in Fig.…”