rate was kept at 100 sccm. After the furnace had cooled to room temperature, a white wool-like product was deposited on the silicon substrate and the temperature of the cold zone was about 1050 C. The collected products were characterized by SEM (FESEM; JEOL JSM 6700F), HRTEM (JEOL 2010, at 200 kV), and EDX attached to the HRTEM. The dielectric properties of the products were measured by a dielectric relaxation spectrometer (Hioki 3531Z HiTESTER) The development of lab-on-a-chip technologies has attracted considerable attention in the past decade because miniaturized devices offer exciting opportunities for analytical, bio-, and synthetic chemistry, as well as for materials science. Downscaling allows the design of portable devices that are capable of performing complete analysis of samples, so-called total analysis systems (see a review by Jakeway et al.[1] ), reduces the amounts of reagents and speeds up processing and reaction times owing to reduced lengths in the device and the correspondingly shorter diffusion times. Finally, lowcost, mass-produced microfluidic chips can be readily adapted for massive parallel analysis or syntheses that work with ultrasmall quantities. A central challenge for downscaling remains the improvement of existing and the development of new device architectures that allow transport, separation, and analysis of reagents. In this communication, we present a novel and versatile approach to integrating semipermeable membranes with thicknesses down to 50 nm in soft lithographic structures.[2] We show that these membranes act as diffusion barriers for macromolecules, while they are permeable for lowmolecular-weight species, which makes them interesting for separation purposes. In addition, such a membrane can be used as an osmotic pressure sensor if its deflection resulting from a pressure difference is monitored. Here, we focus on the first aspect, investigating arrays of micrometer-sized cavities filled with entrapped macromolecules and covered with membranes that are permeable for low-molecular-weight spe-COMMUNICATIONS