Sustainability in Semiconductor Production via Interpretable and Reliable Predictions

Fathi, Kiavash; Stramaglia, Maria; Ristin, Marko; Sadurski, Marcin; Kleinert, Tobias; Schönfelder, Robert; van de Venn, Hans Wernher

doi:10.1016/j.ifacol.2024.07.213

IFAC-PapersOnLine

2024

DOI: 10.1016/j.ifacol.2024.07.213

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Sustainability in Semiconductor Production via Interpretable and Reliable Predictions

Kiavash Fathi,

Maria Stramaglia,

Marko Ristin

et al.

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Sustainability in Semiconductor Production via Interpretable and Reliable Predictions

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