Suspended nanochannel resonators at attogram precision

Ölçüm, Selim; Cermak, Nathan; Wasserman, Steven C.; Payer, Kris; Shen, Wenjiang; Lee, Jungchul; Manalis, Scott R.

doi:10.1109/memsys.2014.6765587

Cited by 6 publications

(7 citation statements)

References 6 publications

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“…Finally, the capacitance sensitivity (

) is derived from the

and the change of capacitance with resonator displacement (

). The theoretical displacement noise at resonance is given by [ 25 ] and represents the effective amplitude of the undriven resonator vibrations caused only by thermal noise; it has units of m·Hz −1/2 .

…”

Section: Resultsmentioning

confidence: 99%

Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators

Perelló-Roig

Verd

Bota

et al. 2018

Sensors

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We analyzed experimentally the noise characteristics of fully integrated CMOS-MEMS resonators to determine the overall thermomechanical noise and its impact on the limit of detection at the system level. Measurements from four MEMS resonator geometries designed for ultrasensitive detection operating between 2-MHz and 8-MHz monolithically integrated with a low-noise CMOS capacitive readout circuit were analyzed and used to determine the resolution achieved in terms of displacement and capacitance variation. The CMOS-MEMS system provides unprecedented detection resolution of 11 yF·Hz−1/2 equivalent to a minimum detectable displacement (MDD) of 13 fm·Hz−1/2, enabling noise characterization that is experimentally demonstrated by thermomechanical noise detection and compared to theoretical model values.

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“…Finally, the capacitance sensitivity (

) is derived from the

and the change of capacitance with resonator displacement (

…”

Section: Resultsmentioning

confidence: 99%

Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators

Perelló-Roig

Verd

Bota

et al. 2018

Sensors

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“…These components are connected in a feedback configuration and, under appropriate conditions, the system operates as an autonomous oscillator [7]. NEMS are currently being used as ultrasensitive mass and force sensors [8], [9].…”

Section: U Z) With Ics and Bcsmentioning

confidence: 99%

Numerical Analysis of Multidomain Systems: Coupled Nonlinear PDEs and DAEs With Noise

Demir

Hanay

2018

IEEE Trans. Comput.-Aided Des. Integr. Circuits Syst.

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We present a numerical modeling and simulation paradigm for multidomain, multiphysics systems with components modeled both in a lumped and distributed manner. The lumped components are modeled with a system of differential-algebraic equations (DAEs), whereas the possibly nonlinear distributed components that may belong to different physical domains are modeled using partial differential equations (PDEs) with associated boundary conditions. We address a comprehensive suite of problems for nonlinear coupled DAE-PDE systems including 1) transient simulation; 2) periodic steady-state (PSS) analysis formulated as a mixed boundary value problem that is solved with a hierarchical spectral collocation technique based on a joint Fourier-Chebyshev representation, for both forced and autonomous systems; 3) Floquet theory and analysis for coupled linear periodically time-varying DAE-PDE systems; 4) phase noise analysis for multidomain oscillators; and 5) efficient parameter sweeps for PSS and noise analyses based on first-order and pseudo-arclength continuation schemes. All of these techniques, implemented in a prototype simulator, are applied to a substantial case study: a multidomain feedback oscillator composed of distributed and lumped components in two physical domains, namely, a nano-mechanical beam resonator operating in the nonlinear regime, an electrical delay line, an electronic amplifier and a sensor-actuator for the transduction between the two physical domains.Index Terms-Chebyshev and Fourier representations and collocation, differential-algebraic equations (DAEs), mixed boundary value problems, multidomain systems, multiphysics simulation, nano electro-mechanical systems (NEMS), noise, oscillators, partial differential equations (PDEs), phase noise, spectral methods.

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“…and is adequate for real-time mass sensing on the order of microseconds even during moments of drastic ramp shaped mass increases. Fast control designs may also be suitable for the detection of single particles in a microfluidic stream [40].…”

Section: A Experiments -Water Vapormentioning

confidence: 99%

System Identification, Design, and Implementation of Amplitude Feedback Control on a Nonlinear Parametric MEM Resonator for Trace Nerve Agent Sensing

Hiller

Holthoff

et al. 2015

J. Microelectromech. Syst.

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In this paper, we develop and experimentally verify a novel amplitude feedback control scheme on a silicon microbeam for real-time sensing of parts-per-trillion (ppt) nerve agent concentrations. Utilizing the nonlinear dynamics resulting from parametric excitation of the microbeam for sensing at atmospheric pressure has demonstrated superior performance compared with conventional linear forced sensing. The microbeam is coated with a molecularly imprinted polymer that selectively adsorbs dimethyl methylphosphonate (DMMP) a precursor to G-series nerve agents including sarin. When the molecules attach to the microbeam and increase its mass, the amplitude response described by the nonlinear dynamics shifts in frequency. In tracking this frequency shift, information about the mass load, and, therefore, the nerve agent concentration, can be extracted. Previous sensing schemes have successfully applied this concept while relying on experimentally designed controllers. This paper features a model-based approach starting with the nonlinear dynamics and system parameter identification. After linearization, a control designed with the Glover-McFarlane H ∞ loop-shaping procedure robustly stabilizes the system. The control scheme is implemented on a LabView field-programmable gate array. Water vapor and trace DMMP real-time experiments at atmospheric pressure demonstrate the control's functionality. A limit of detection of 13.3 ppt DMMP molecules in nitrogen is established.[2014-0330]

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Suspended nanochannel resonators at attogram precision

Cited by 6 publications

References 6 publications

Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators

Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators

Numerical Analysis of Multidomain Systems: Coupled Nonlinear PDEs and DAEs With Noise

System Identification, Design, and Implementation of Amplitude Feedback Control on a Nonlinear Parametric MEM Resonator for Trace Nerve Agent Sensing

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