Nanomechanical resonators enable a range of precision measurements in air or vacuum, but strong viscous damping makes applications in liquid challenging. Recent experiments have shown that fluid damping is greatly reduced in fluidic embedded-channel microcantilevers. Here we report the discovery of nonmonotonic energy dissipation due to the fluid in such devices, which leads to the intriguing prospect of enhancing the quality factor upon miniaturization. These observations elucidate the physical mechanisms of energy dissipation in embedded-channel resonators and thus provide the basis for numerous applications in nanoscience and biology. DOI: 10.1103/PhysRevLett.102.228103 PACS numbers: 87.85.Qr, 81.07.Àb, 85.85.+j Micro-and nanomechanical cantilevers are widely used as sensitive probes for physical measurements in materials science, engineering and biology. In vacuum and air, detecting shifts in the resonance frequency enables exquisitely sensitive measurements of mass and detection of single DNA molecules, single viral particles, and single bacterial cells [1][2][3][4]. However, numerous applications in nanotechnology and the life sciences require samples to be contained in liquid. This is challenging because strong viscous damping severely degrades frequency resolution by lowering the quality factor (inverse scaled energy dissipation, Q) to around unity [5][6][7][8], in stark contrast to Q $ 10 4 -10 6 achieved with resonators in vacuum. In gases, miniaturizing the resonator to dimensions comparable to the mean free path provides substantial improvements [5]. However, liquids do not admit an analogous approach, and uniformly reducing the resonator size, or equivalently, increasing viscosity always lead to a monotonic degradation in Q [6].Recently, measurements have demonstrated that viscous damping is substantially reduced by confining the (liquid) sample to a microfluidic channel embedded inside a cantilever beam surrounded by vacuum; Fig. 1(a) [9]. Such devices enable mass measurements of nanoparticles, single bacterial cells, and submonolayers of adsorbed proteins with femtogram sensitivity in liquid [9]. Applications also include ultralow volume universal detection for liquid chromatography [10], the measurement of fluid density [11][12][13], and the measurement of mass flow [14].A key outstanding question is how energy dissipation, and hence sensitivity, scales with the size of the resonator and the density and viscosity of the fluid. We investigate the effect of the fluid only; variations in the intrinsic quality factor with size have been investigated elsewhere [15]. This is of particular interest since two of the most intriguing size regimes for these devices remain to be explored: (i) where the resonators are small enough to acquire mass spectra of viruses, protein complexes, and ultimately single molecules directly in solution, and (ii) where the channel is large enough to measure the growth of mammalian cells by monitoring their mass with high precision.In this Letter, we address this question ...