Suspended Mechanical Structures Based on Elastic Silicon Nanowire Arrays

Paulo, Álvaro San; Arellano, Noel; Plaza, J.A.; He, Rongrui; Carraro, Carlo; Maboudian, Roya; Howe, Roger T.; Bokor, J.; Yang, Peidong

doi:10.1021/nl062877n

Cited by 61 publications

(59 citation statements)

References 31 publications

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“…Multiplexed detection based on resonant NEMS has not been attempted, though nanomechanical arrays [33,187] have been recently suggested. Multiplexed detection is of a great importance because it allows the diagnosis of distinct, different diseases.…”

Section: Perspectives and Challengesmentioning

confidence: 99%

Nanomechanical resonators and their applications in biological/chemical detection: Nanomechanics principles

et al. 2011

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Recent advances in nanotechnology have led to the development of nano-electro-mechanical systems (NEMS) such as nanomechanical resonators, which have recently received significant attention from the scientific community. This has not only been for their capability for the label-free detection of bio/chemical-molecules at single-molecule (or atomic) resolution for future applications such as the early diagnostics of diseases such as cancer, but also for their unprecedented ability to detect physical quantities such as molecular weight, elastic stiffness, surface stress, and surface elastic stiffness for adsorbed molecules on the surface. Most experimental works on resonator-based molecular detection have been based on the principle that molecular adsorption onto a resonator surface increases the effective mass, and consequently decreases the resonant frequencies of the nanomechanical resonator. However, this principle is insufficient to provide fundamental insights into resonator-based molecular detection at the nanoscale; this is due to recently proposed novel nanoscale detection principles including various effects such as surface effects, nonlinear oscillations, coupled resonance, and stiffness effects. Furthermore, these effects have only recently been incorporated into existing physical models for resonators, and therefore the universal physical principles governing nanoresonator-based detection have not been completely described. Therefore, our objective in this review is to overview the current attempts to understand the underlying mechanisms in nanoresonator-based detection using physical models coupled to computational simulations and/or experiments. Specifically, we will focus on issues of special relevance to the dynamic behavior of nanoresonators and their applications in biological/chemical detection: the resonance behavior of micro/nano-resonators; resonator-based chemical/biological detection; physical models of various nanoresonators such as nanowires, carbon nanotubes, and graphene. We pay particular attention to experimental and computational approaches that have been useful in elucidating the mechanisms underlying the dynamic behavior of resonators across multiple and disparate spatial/length scales, and the resulting insight into resonator-based detection that has been obtained. We additionally provide extensive discussion regarding potentially fruitful future research directions coupling experiments and simulations in order to develop a fundamental understanding of the basic physical principles that govern NEMS and NEMS-based sensing and detection applications.

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Section: Perspectives and Challengesmentioning

confidence: 99%

Nanomechanical resonators and their applications in biological/chemical detection: Nanomechanics principles

et al. 2011

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“…This method ensures selective growth of Si NWs only at siliconexposed areas. 8 Silicon nanowires with 90 nm average diameter and 10 lm length were grown in an atmospheric-pressure CVD reactor at 750°C to 800°C with 10% H 2 /Ar as both the diluent and carrier gas. The carrier gas was circulated through liquid SiCl 4 (growth precursor) and BBr 3 (in situ p-doping) bubblers kept at 0°C to maintain constant vapor pressure.…”

Section: Methodsmentioning

confidence: 99%

“…Chemical vapor deposition (CVD) based on the vapor-liquid-solid mechanism has been employed for the silicon nanowire growth. 8 To characterize the device, electrical characterization and thermoreflectance imaging 9,10 have been used to observe the heat transfer along the device.…”

Section: Introductionmentioning

confidence: 99%

Planar Thermoelectric Microgenerators Based on Silicon Nanowires

Dávila

Tarancón

Kendig

et al. 2011

Journal of Elec Materi

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Silicon nanowires have been implemented in microfabricated structures to develop planar thermoelectric microgenerators (lTEGs) monolithically integrated in silicon to convert heat flow from thermal gradients naturally present in the environment into electrical energy. The compatibility of typical microfabrication technologies and the vapor-liquid-solid (VLS) mechanism employed for silicon nanowire growth has been evaluated. Low-thermal-mass suspended structures have been designed, simulated, and microfabricated on silicon-on-insulator substrates to passively generate thermal gradients and operate as microgenerators using silicon nanowires as thermoelectric material. Both electrical measurements to evaluate the connectivity of the nanowires and thermoreflectance imaging to determine the heat transfer along the device have been employed.

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“…Recently, Si-NWs have been used in the fabrication of DNA sensors [1]. The ability to control the unique morphological and mechanical properties of Si-NWs arrays demonstrated by Paulo and coworkers [2] opens new perspectives for the development of array based electrical and electrochemical systems. In addition, there are studies [3,4] of fabricating Si-NWs vertical surround-gate field effect transistor (VS-FET).…”

Section: Introductionmentioning

confidence: 99%

Controlled Crystal-Growth and Structures of Silicon Nanowires for smart applications

2017

SDRP-JNMS

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Abstract:One-dimensional nanostructures such as semiconductor nanowires (NWs) are attractive building blocks due to their promising physical properties and potential as active materials in future electronic and optoelectronic applications. The Crystal growth of nanowires occurs mainly at the interfaces between the growing crystals and the supply media. This article reports on the silicon nanowires grown using a vapor-liquid-solid (VLS) concept. One of the key advantages and the beauty of VLS is that controlled placement or templating of the seed metal produces consequently templated NW growth. This templating is highly required for direct integration of NWs into nanodevices for various smart applications, including sensors, actuators, thermoelectricity generation and photovoltaics. We discuss the major questions related to the discovery of fundamentally new phenomena versus performance benchmarking for many of the Si-NWs applications. Finally we attempt to look into the future and discuss our opinion regarding the upcoming trends in NW research.

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Suspended Mechanical Structures Based on Elastic Silicon Nanowire Arrays

Cited by 61 publications

References 31 publications

Nanomechanical resonators and their applications in biological/chemical detection: Nanomechanics principles

Nanomechanical resonators and their applications in biological/chemical detection: Nanomechanics principles

Planar Thermoelectric Microgenerators Based on Silicon Nanowires

Controlled Crystal-Growth and Structures of Silicon Nanowires for smart applications

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