“…3p 2 P 1/2,3/2 : 395.1 and 396.2 nm) lines. The intensity of photons emitted from the excited neutrals, which were sputtered from the surface, was strongly affected by the particles adsorbed on the surface [21]. Therefore, it was considered that surface diagnostics by optical spectroscopy is sensitive to the topmost layer or the adsorbed particles.…”