Survey on Robust Control of Precision Positioning Systems

Raafat, Safanah M.; Akmeliawati, Rini

doi:10.2174/2212797611205010055

Cited by 8 publications

(4 citation statements)

References 87 publications

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“…A combined feedback and feedforward control structure is more effective in precision motion control (Ahn et al, 2007; Devasia et al, 2007; Raafat and Akmeliawati, 2012; Shan and Leang, 2013; Shen et al, 2014). Among feedback control algorithms, PID is commonly used in industrial processes because of its simplicity and the ease of implementation (Ang et al, 2005).…”

Section: Combined Feedback Pid With Feedforward Pdccilcmentioning

confidence: 99%

“…A conventional control strategy for a multi-axis motion system is independent axis control. A great deal of worthy efforts, such as proportional–integral–derivative (PID) control (Devasia et al, 2007), robust control (Raafat and Akmeliawati, 2012), sliding-mode control (Shen et al, 2014), iterative learning control (ILC; Wang et al, 2015), repetitive control (Shan and Leang, 2012) and polynomial-based pole placement control (Aphale et al, 2008), have been devoted to solving decoupled control problem. However, good tracking performance of each individual axis does not guarantee the reduction of contour errors for multi-axis systems, as poor synchronization of relevant motion axes may result in diminished accuracy of the contour tracking performance (Ouyang et al, 2012).…”

Section: Introductionmentioning

confidence: 99%

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Non-linear contour tracking using feedback PID and feedforward position domain cross-coupled iterative learning control

Ling

Feng

Yao

et al. 2017

Transactions of the Institute of Measurement and Control

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In this paper, a position domain cross-coupled iterative learning controller combining proportional–integral–derivative (PID)-type iterative learning control (ILC) and proportional–derivative (PD)-type cross-coupling control (CCC) is presented aiming at non-linear contour tracking in multi-axis motion systems. Traditional individual control methods in the time domain suffer from poor synchronization of relevant motion axes. The complicated computation of coupling gains in CCC and cross-coupled ILC (CCILC) restricts their applications for non-linear contour. The proposed position domain CCILC (PDCCILC) approach introduces a position domain design concept into CCILC to improve synchronization and performance for non-linear contour tracking and it relies less on the accuracy of coupling gains than conventional CCILC. The stability and performance analysis are conducted using a lifted system representation. The contour error vector method is applied to estimate the coupling gains in simulations and experiments. Simulation and experimental results of three typical non-linear contour tracking cases (i.e. semi-circle, parabola and spiral) based on a two-axis micro-motion stage demonstrate superiority and efficacy of the proposed feedback PID and feedforward PDCCILC compared with existing ILC and CCILC in the time domain.

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Section: Combined Feedback Pid With Feedforward Pdccilcmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Non-linear contour tracking using feedback PID and feedforward position domain cross-coupled iterative learning control

Ling

Feng

Yao

et al. 2017

Transactions of the Institute of Measurement and Control

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“…A PMSM is a kind of high-efficient and high-powered motor which is widely used in motor drive, various servo systems and household appliances [4,9,11,15,24,28,36], due to its high torque per volume ratio and efficiency along with low maintenance [26,39]. Unfortunately, it has been proven recently that the dynamics performance of PMSM is sensitive to system parameter perturbations in the whole operation process [29,31].…”

Section: Introductionmentioning

confidence: 99%

Permanent magnet synchronous motor: chaos control using single controller, synchronization and circuit implementation

et al. 2020

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The aim of this paper is to address the problem of the electronic implementation of chaos control using a single controller and synchronization of chaotic permanent magnet synchronous motor (PMSM). Firstly, different dynamical behaviors of the PMSM including steady state, periodic and chaotic behaviors are found using numerical methods such as twodimensional largest Lyapunov exponents graph associated with two parameters of PMSM. Secondly, two simple and single controllers are designed and added to the chaotic PMSM in order to suppress chaotic behavior. The performance of the two proposed simple and single controllers is illustrated by numerical simulations. Thirdly, controllers are designed to achieve synchronization of unidirectional coupled identical chaotic PMSMs. Numerical simulations are also used to verify the effectiveness of the synchronization. Finally, the existence of chaos in PMSM and the physical feasibility of the proposed two simple and single controllers as well as the chaos synchronization are validated through the circuit implementation on OrCAD-PSpice software. The circuit implementation results comply fairly with those of the numerical simulation results and establish that the existence of chaotic behavior in the PMSM and the achievement of chaos synchronization in unidirectional coupled identical PMSMs designed and the two single controllers designed are effective and successful in suppressing chaotic behavior in PMSM.

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“…This makes the motion control of wafer stage and reticle stage becomes very hard. For a precision tracking and positioning system, precise sensors and well feedback control method are key to success [4].…”

Section: Introductionmentioning

confidence: 99%

An adaptive neural network backstepping control method for reticle stage of lithography

Wang

Chen

Liu

et al. 2014

Proceeding of the 11th World Congress on Intelligent Control and Automation

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This paper proposes an adaptive neural network backstepping tracking control method for the long-stroke reticle stage of lithography. The main feature of this method is that it can real-time online estimate the unknown model parameters of long-stroke reticle stage actuator under some nonlinear effects including load disturbance, force ripple and slot effect by radial basis function(RBF) neural network. First, in the study according to the actual system a nominal model of long-stroke reticle stage is established. Then, with this nominal model the derivation of the control method, the design of the adaptive law and the Lyapunov stability proof are made. From the results of the analysis above, it can be seen that this control method can sufficiently guarantee the convergence of the system's position and velocity errors. At last, this control method is verified by a simulation experiment. From the result of fifth-order S-curve tracking test, the tracking accuracy of the position and velocity can meet the design requirements well. Because it doesn't need to model the actual mechanical system and external uncertainties precisely, this method is very suitable for application in the field of ultra-precision manufacturing. Index Terms -lithography; reticle stage; neural network; backstepping; adaptive [ ( , ) ( , ) ] d d d in d

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Survey on Robust Control of Precision Positioning Systems

Cited by 8 publications

References 87 publications

Non-linear contour tracking using feedback PID and feedforward position domain cross-coupled iterative learning control

Non-linear contour tracking using feedback PID and feedforward position domain cross-coupled iterative learning control

Permanent magnet synchronous motor: chaos control using single controller, synchronization and circuit implementation

An adaptive neural network backstepping control method for reticle stage of lithography

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