Survey of methods to characterize thin absorbing films with Spectroscopic Ellipsometry

Hilfiker, James N.; Singh, Neha; Tiwald, Thomas E.; Convey, Diana; Smith, Steven M.; Baker, J.; Tompkins, Harland G.

doi:10.1016/j.tsf.2008.04.060

Cited by 260 publications

(178 citation statements)

References 16 publications

Supporting

Mentioning

173

Contrasting

Unclassified

Order By: Relevance

“…This combination of measurements enables a precise simultaneous determination of the dielectric function and thickness of very thin absorbing films. 20 It must be pointed out that the model used for the effective dielectric function was isotropic. In principle, one may expect that measurements at oblique incidence of a two-dimensional ensemble of nanoparticles will reveal different optical response owing the excitation of different plasmon resonance of particles depending on the polarization direction.…”

Section: Methodsmentioning

confidence: 99%

Tuning the effective dielectric function of thin film metal-dielectric composites by controlling the deposition temperature

2011

View full text Add to dashboard Cite

Abstract. The influence of the substrate temperature on the effective optical behavior of Ag-SiO 2 composites obtained by electron beam evaporation was studied. Optical characterization of the composites was performed by means of spectroscopic ellipsometry measurements. The effective dielectric function of the composites, modeled using a multiple oscillator approach, could be widely tuned by controlling the deposition temperature. The spectral dependence of the composite absorption appeared to be better described with a Gaussian line shape than with the classical Lorentz oscillator model. The description of the effective dielectric function using standard effective medium theories failed and the experimental results could be explained only in the general framework of the Bergman spectral density theory. C 2011 Society of Photo-Optical Instrumentation Engineers (SPIE).

show abstract

Section: Methodsmentioning

confidence: 99%

Tuning the effective dielectric function of thin film metal-dielectric composites by controlling the deposition temperature

2011

View full text Add to dashboard Cite

show abstract

“…These results demonstrate that thickness plays an important role in the optical properties of Al 2 O 3 thin films. The absorption coefficient also can be calculated from analysis through the relationship = 4 / [23]. It can be seen that the increased film thickness enhance the absorption capacity of materials.…”

Section: Optical Property Analysis Spectroscopic Ellipsometer (Se)mentioning

confidence: 99%

Structural and Optical Properties of Amorphous Al₂O₃ Thin Film Deposited by Atomic Layer Deposition

Shi

Qian

Hou

et al. 2018

Advances in Condensed Matter Physics

View full text Add to dashboard Cite

Aluminum oxide (Al 2 O 3 ) amorphous structure with short-range order and long-range disorder has presented promising applications in optical and optoelectronic devices. In this paper, the Al 2 O 3 films with different thickness were prepared by atomic layer deposition (ALD) technology at 200 ∘ C in order to achieve amorphous structure. X-ray diffraction (XRD) and energy dispersive spectrum (EDS) results indicated that the Al 2 O 3 films were amorphous structure and stable O/Al ratio. The surface topography investigated by atomic force microscopy (AFM) showed that the samples were smooth and crack-free. Spectroscopic ellipsometer (SE) measurements were operated to investigate the effect of thickness on the structure and optical properties of films with Tauc-Lorentz model. It is found that the band gap exhibits a steady value ∼2.3 eV by the UV-VIS transmittance method, but the T-L model was ∼3.0 eV. The refractive index and extinction coefficient are related to the variation of thickness and the samples surface quality of amorphous network structure in the thin films. The outstanding optoelectronic properties and facile fabrication of Al 2 O 3 films amorphous structure can be extended to other similar oxides, which could display wide applications in various engineering and industrial fields.

show abstract

“…The statistical uncertainty of the effective thickness as determined by ellipsometric measurements was between 1 and 5%. At this point, it has to be remarked that the simultaneous use of ellipsometric and transmittance measurements permits reducing the otherwise strong correlation between optical constants and thickness for very thin absorbing films 9 . GISAXS scattering patterns reveal that the film is composed of nanometric clusters distributed at the sample surface, as shown by the presence of two lobes of scattered light symmetric with respect to the incidence angle.…”

Section: Resultsmentioning

confidence: 99%

Optical and structural properties of Au-Ag islands films for plasmonic applications

et al. 2011

View full text Add to dashboard Cite

Abstract-Bimetallic islands films consisting of composite Au-Ag nanoparticles are deposited on glass substrates by electron beam evaporation. Broad tuning of the surface plasmon resonance (SPR) characteristics can be achieved by controlling film composition, deposition temperature and post-deposition thermal annealing. Optical and structural characterization of the samples enable to establish the link between the SPR and the morphological and compositional characteristics of nanoparticles.

show abstract

Survey of methods to characterize thin absorbing films with Spectroscopic Ellipsometry

Cited by 260 publications

References 16 publications

Tuning the effective dielectric function of thin film metal-dielectric composites by controlling the deposition temperature

Tuning the effective dielectric function of thin film metal-dielectric composites by controlling the deposition temperature

Structural and Optical Properties of Amorphous Al₂O₃ Thin Film Deposited by Atomic Layer Deposition

Optical and structural properties of Au-Ag islands films for plasmonic applications

Contact Info

Product

Resources

About

Survey of methods to characterize thin absorbing films with Spectroscopic Ellipsometry

Cited by 260 publications

References 16 publications

Tuning the effective dielectric function of thin film metal-dielectric composites by controlling the deposition temperature

Tuning the effective dielectric function of thin film metal-dielectric composites by controlling the deposition temperature

Structural and Optical Properties of Amorphous Al2O3 Thin Film Deposited by Atomic Layer Deposition

Optical and structural properties of Au-Ag islands films for plasmonic applications

Contact Info

Product

Resources

About

Structural and Optical Properties of Amorphous Al₂O₃ Thin Film Deposited by Atomic Layer Deposition