Surfactant Sputtering: Theory of a new method of surface nanostructuring by ion beams

Kree, Reiner; Yasseri, Taha; Hartmann, Alexander K.

doi:10.1016/j.nimb.2009.01.150

Cited by 22 publications

(10 citation statements)

References 20 publications

(23 reference statements)

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“…For the case of Si, it has been extensively considered in Section 3.2 from the experimental point of view. With respect to continuum descriptions of this class of experiments, an initial proposal was put forward in [255], in the context of so-called surfactant codeposition. It takes the form of a two-field system, in which the evolution of the impurity (surfactant) density is coupled with that of the local velocity of the eroding surface.…”

Section: Two-field Composition Modelsmentioning

confidence: 99%

Self-organized nanopatterning of silicon surfaces by ion beam sputtering

Muñoz-García

Vázquez

Castro

et al. 2014

Materials Science and Engineering: R: Reports

159

201

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Section: Two-field Composition Modelsmentioning

confidence: 99%

Self-organized nanopatterning of silicon surfaces by ion beam sputtering

Muñoz-García

Vázquez

Castro

et al. 2014

Materials Science and Engineering: R: Reports

159

201

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“…The ion erosion process can be further customized by an in situ chemical surface modification. [14][15][16] For this purpose, a reactive surface species is additionally provided during the erosion process, eg, by co-deposition. This surfactant-assisted ion erosion process can promote the surface structuring.…”

Section: Introductionmentioning

confidence: 99%

Orientation‐dependent nanostructuring of titanium surfaces by low‐energy ion beam erosion

Bauer

Frost

2020

Surface & Interface Analysis

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Regular nanoscopic ripple and dot patterns are fabricated on poly-crystalline titanium samples by irradiation with 1.5 keV argon ions at normal incidence. The morphology of the nanostructures is investigated by scanning electron microscopy and scanning force microscopy. The ripple structures exhibit a saw-tooth cross-section profile. Electron backscatter diffraction experiments are performed to analyze the local grain structure. The study suggests a distinct correlation of the nanostructure morphology to the crystallographic orientation of the titanium surface. KEYWORDS low-energy ion beams, metals, nanostructures, titanium This is an open access article under the terms of the Creative Commons Attribution License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited.

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“…Kree et al have first presented a continuum theory as well as a Mont Carlo simulation taking into account surfactant sputtering [23,24]. The Monte Carlo simulation is based on a solid-on-solid model with two types of atoms A and B with different but interconnected erosion and diffusion parameters.…”

Section: Introductionmentioning

confidence: 99%

The role of phase separation for self-organized surface pattern formation by ion beam erosion and metal atom co-deposition

et al. 2012

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We investigate the ripple pattern formation on Si surfaces at room temperature during normal incidence ion beam erosion under simultaneous deposition of different metallic co-deposited surfactant atoms. The co-deposition of small amounts of metallic atoms, in particular Fe and Mo, is known to have a tremendous impact on the evolution of nanoscale surface patterns on Si. In previous work on ion erosion of Si during co-deposition of Fe atoms, we proposed that chemical interactions between Fe and Si atoms of the steady-state mixed Fe x Si surface layer formed during ion beam erosion is a dominant driving force for self-organized pattern formation. In particular, we provided experimental evidence for the formation of amorphous iron disilicide. To confirm and generalize such chemical effects on the pattern formation, in particular the tendency for phase separation, we have now irradiated Si surfaces with normal incidence 5 keV Xe ions under simultaneous gracing incidence co-deposition of Fe, Ni, Cu, Mo, W, Pt, and Au surfactant atoms. The selected metals in the two groups (Fe, Ni, Cu) and (W, Pt, Au) are very similar regarding their collision cascade behavior, but strongly differ regarding their tendency to silicide formation. We find pronounced ripple pattern formation only for those co deposited metals (Fe, Mo, Ni, W, and Pt), which are prone to the formation of mono and disilicides. In contrast, for Cu and Au co-deposition the surface remains very flat, even after irradiation at high ion fluence. Because of the very different behavior of Cu compared to Fe, Ni and Au compared to W, Pt, phase separation toward amorphous metal silicide phases is seen as the relevant pro-

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Surfactant Sputtering: Theory of a new method of surface nanostructuring by ion beams

Cited by 22 publications

References 20 publications

Self-organized nanopatterning of silicon surfaces by ion beam sputtering

Self-organized nanopatterning of silicon surfaces by ion beam sputtering

Orientation‐dependent nanostructuring of titanium surfaces by low‐energy ion beam erosion

The role of phase separation for self-organized surface pattern formation by ion beam erosion and metal atom co-deposition

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