Surfactant-controlled damage evolution during chemical mechanical planarization of nanoporous films

Kim, Taek‐Soo; Konno, Tomohisa; Dauskardt, Reinhold H.

doi:10.1016/j.actamat.2009.06.022

Cited by 24 publications

(11 citation statements)

References 40 publications

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“…As the stresses applied to the interface during dehydration cannot be released by a stretching of the Triton molecules, it seems that the breakage of the bonds between the hydrophilic groups gives rise to cracks opening. Thus, the coalescence of the two surfactant layers observed by Kim et al (2009) do not seem to occur here, probably because of a too fast dehydration. As long as those cracks do not coalesce through the material and remain lower in size than 70 nm, they fairly contribute to the thermal properties.…”

Section: Role Of the Surfactants In The Presence Of Aerogelsmentioning

confidence: 80%

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Study of the surfactant role in latex–aerogel systems by scanning transmission electron microscopy on aqueous suspensions

Perret

Foray

Masenelli‐Varlot

et al. 2017

Journal of Microscopy

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SummaryFor insulation applications, boards thinner than 2 cm are under design with specific thermal conductivities lower than 15 mW m −1 K −1 . This requires binding slightly hydrophobic aerogels which are highly nanoporous granular materials. To reach this step and ensure insulation board durability at the building scale, it is compulsory to design, characterise and analyse the microstructure at the nanoscale. It is indeed necessary to understand how the solid material is formed from a liquid suspension. This issue is addressed in this paper through wet-STEM experiments carried out in an Environmental Scanning Electron Microscope (ESEM). Latex-surfactant binary blends and latex-surfactant-aerogel ternary systems are studied, with two different surfactants of very different chemical structures. Image analysis is used to distinguish the different components and get quantitative morphological parameters which describe the sample architecture. The evolution of such morphological parameters during water evaporation permits a good understanding of the role of the surfactant.

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Section: Role Of the Surfactants In The Presence Of Aerogelsmentioning

confidence: 80%

“…Thus, the coalescence of the two surfactant layers observed by Kim et al . () do not seem to occur here, probably because of a too fast dehydration. As long as those cracks do not coalesce through the material and remain lower in size than 70 nm, they fairly contribute to the thermal properties.…”

Section: Discussionmentioning

confidence: 98%

Study of the surfactant role in latex–aerogel systems by scanning transmission electron microscopy on aqueous suspensions

Perret

Foray

Masenelli‐Varlot

et al. 2017

Journal of Microscopy

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“…If sandstone rock is considered to have a layer-by-layer structure, it is then more complex for an aqueous solution to diffuse into each layer and lead to a change in the layer stress, which can be enhanced in the presence of surfactant molecules. Kim (2009) demonstrates that a surfactant in aqueous solutions can significantly affect the crack growth rate in organosilicate thin films. In this mechanism, the surfactant transports to a nanoscale confined crack and interacts with the crack surface.…”

Section: Spontaneous Crack Initiation and Growth By Surfactantmentioning

confidence: 99%

“…Indeed, the crack growth rate can be related to the surface energy of crack surface ␥ F through Eq. 4 by using chemical reaction rate models (Kim et al 2009):…”

Section: Spontaneous Crack Initiation and Growth By Surfactantmentioning

confidence: 99%

Insights into Surfactant Containing Fracturing Fluids Inducing Microcracks and Spontaneously Imbibing in Shale Rocks

Nguyen

2015

Day 2 Wed, October 21, 2015

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Surfactants are typically added into fracturing fluids to assist flowback and/or enhance oil and gas production from liquids-rich shale formations. Two primary benefits that can be overlooked are the potential capability of surfactants to initiate microcracks near primary fractures and spontaneous imbibition farther into the formation rocks. With the additional initiation of microcracks and access to hydrocarbon reserves, initial production can be enhanced and production declines, over time, can also be mitigated.In this study, new mechanisms for surfactants to initiate microcracks and accelerate crack growth are proposed in which the speed of microcrack propagation could be controlled by the rate at which surfactant is advected to the crack tip by means of induced Marangoi flows (Vella et al. 2006). The accelerated crack growth is related to a decrease of the crack surface energy enabled in the presence of surfactant.On the other hand, a new mechanism has been previously proposed for increasing the contact area between fracturing fluids and the matrix. The working hypothesis is that a surfactant, when properly tailored to treatment fluids, can spontaneously spread in the matrix and access additional hydrocarbon reserves.The data indicate that fracturing designs could be further optimized by using a surfactant to activate more cracks. The shut-in time immediately after fracturing also could be crucial for enhanced well productivity. An extended shut-in time could result in the additional initiation of microcracks, farther penetration of fracturing fluids into the matrix, and greater oil recovery in liquids-rich shale plays.

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“…[5][6][7][8][9][10][11] Such damages in the low-k dielectric layers are known to take place at the scales from micrometers to a few nanometers. [12][13][14][15][16] Thus, damage-free processing and quantitative characterization of any possible damages of the complex interface system in damascene structure signicantly dominate the reliability of multilevel interconnects and need to be claried before practical implementations. In particular, the nanometer scale damages are quite difficult to analyze.…”

Section: Introductionmentioning

confidence: 99%

Structural reliability evaluation of low-k nanoporous dielectric interlayers integrated into microelectronic devices

et al. 2015

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Surfactant-controlled damage evolution during chemical mechanical planarization of nanoporous films

Cited by 24 publications

References 40 publications

Study of the surfactant role in latex–aerogel systems by scanning transmission electron microscopy on aqueous suspensions

Study of the surfactant role in latex–aerogel systems by scanning transmission electron microscopy on aqueous suspensions

Insights into Surfactant Containing Fracturing Fluids Inducing Microcracks and Spontaneously Imbibing in Shale Rocks

Structural reliability evaluation of low-k nanoporous dielectric interlayers integrated into microelectronic devices

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