2023
DOI: 10.1364/josaa.483381
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Surface weak scratch detection for optical elements based on a multimodal imaging system and a deep encoder–decoder network

Abstract: The detection of surface weak scratches is an intractable but vital task in optics-centered industries. However, the intrinsic characteristics of weak scratches, such as a narrow width, long span, and shallow depth, make it extremely difficult to effectively detect these scratches. In this paper, we tackle this issue from two perspectives. First, a multimodal microscopic imaging system is created by combining discrete multispectral illumination with linear polarization. Imaging experiments demonstrated that th… Show more

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Cited by 1 publication
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References 28 publications
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