A pure bulk-phase pentaceneˆlm is an attractive material because of its high mobility. We prepared bulk-phase pentacenê lms by increasing the thermal energy of pentacene molecules. In this method, a heated tungsten (W) mesh was set between a pentacene source and a substrate in a vacuum chamber. The thermal energy of pentacene molecules was increased by contact with the heated W mesh in H 2 atmosphere before reaching the substrate. As the mesh temperature increased from room temperature to 1200°C, the intensity ratio of the bulk phase to the thin-ˆlm phase increased from 0 to 9.7. Moreover, we determined the structural properties and growth mechanism related to the thermal energy of pentacene molecules on the growth surface, and the eŠects of atomic hydrogen.