Surface Texturing of TiO2 Film by Mist Deposition of TiO2 Nanoparticles

Abstract

Unique and various microstructures of titanium oxide (TiO2) film including macroporous structure, chromatic veins and rings, have been easily fabricated by mist deposition method on silicon substrate with mild preparation conditions. Rutile phase TiO2 nanoparticles were directly used as starting material to prepare film and led to a simple preparation process. It was found that several different microstructures existed in the sample and changed with the varied positions from the center to the edge of the film when the concentration of the TiO2 suspension is 0.06 mol/l, the deposition time is 30 min, the flow rate is 1 l/min and the temperature is 150℃. The surface texturing shows apparent distinction as the concentration of the TiO2 suspension decreased to 0.03 mol/l and 0.01 mol/l.

A nanoparticle-mist deposition method: fabrication of high-performance ITO flexible thin films under atmospheric conditions

“…However, only a few studies about employing the mist-assisted deposition method for functional thin films using NP dispersions have been reported. Watanabe 35 and Kim 36 et al reported the preparation of porous TiO 2 films from preheated and dried spray mists, respectively. More recently, we demonstrated the preparation of gallium-doped zinc oxide (GZO) on glass substrates as TCO thin films by the GZO NP-mist deposition method 37 .…”

A Nanoparticle-Mist Deposition Method: Fabrication of High-Performance ITO Flexible Thin Films under Atmospheric Conditions

“…However, only a few studies about employing the mist-assisted deposition method for functional thin lms using NP dispersions have been reported. Watanabe [35] and Kim [36] et al reported the preparation of porous TiO 2 lms from preheated and dried spray mists, respectively. More recently, we demonstrated the preparation of galliumdoped zinc oxide (GZO) on glass substrates as TCO thin lms by the GZO NP-mist deposition method.…”