Surface Texturing of TiO2 Film by Mist Deposition of TiO2 Nanoparticles

Abstract

Unique and various microstructures of titanium oxide (TiO2) film including macroporous structure, chromatic veins and rings, have been easily fabricated by mist deposition method on silicon substrate with mild preparation conditions. Rutile phase TiO2 nanoparticles were directly used as starting material to prepare film and led to a simple preparation process. It was found that several different microstructures existed in the sample and changed with the varied positions from the center to the edge of the film when the concentration of the TiO2 suspension is 0.06 mol/l, the deposition time is 30 min, the flow rate is 1 l/min and the temperature is 150℃. The surface texturing shows apparent distinction as the concentration of the TiO2 suspension decreased to 0.03 mol/l and 0.01 mol/l.

Gallium-Doped Zinc Oxide Nanoparticle Thin Films as Transparent Electrode Materials with High Conductivity

“…To date, the mist-assisted chemical deposition of functional thin films has been reported for devices, such as ZO, solar cells, − sensors, − transistors, and SnO 2 -based, , In 2 O 3 -based, − and ZnO-based TCOs. − However, to the best of our knowledge, NP-containing dispersions have yet to be applied for the mist deposition of functional thin films with high packing density. Instead, porous and rough TiO 2 films have been fabricated using preheated and dried spray mists, respectively. In the present report, we first observe that the NP-mist-deposited GZO films on glass substrates exhibit low resistivity and high transparency in the visible light region, and the performance of the NP-mist-deposited GZO thin films may make them applicable for use as ITO alternatives for TCO thin films.…”