Surface texturing of polytetrafluoroethylene by hot embossing

Jucius, Dalius; Guobienė, Asta; Grigaliūnas, V.

doi:10.1016/j.apsusc.2009.09.067

Cited by 30 publications

(22 citation statements)

References 21 publications

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“…It would be much better if these effects could be either eliminated completely or controlled in a way that they could be used for large process latitude, e.g., by choosing appropriate designs and process parameters, if low residual layers, low imprint temperatures, fast imprint times, or good pattern transfer were required. A possibility to observe the important parameters of molding, the evolution of the residual layer thickness, was described by Baraldi 12 by integrating a microscope into the imprint machine and by Yu et al, 218 Jucius et al, 219 and Lévéder et al 220 for scatterometry. Apart from real-time measurements, visualization of mold filling can be done by freezing different states.…”

Section: F Unwanted Effects and Unsolved Questionsmentioning

confidence: 99%

Nanoimprint lithography: An old story in modern times? A review

Schift

2008

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

676

442

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Nanoimprint lithography ͑NIL͒ is a high throughput, high-resolution parallel patterning method in which a surface pattern of a stamp is replicated into a material by mechanical contact and three dimensional material displacement. This can be done by shaping a liquid followed by a curing process for hardening, by variation of the thermomechanical properties of a film by heating and cooling, or by any other kind of shaping process using the difference in hardness of a mold and a moldable material. The local thickness contrast of the resulting thin molded film can be used as a means to pattern an underlying substrate on wafer level by standard pattern transfer methods, but also directly in applications where a bulk modified functional layer is needed. Therefore it is mainly aimed toward fields in which electron beam and high-end photolithography are costly and do not provide sufficient resolution at reasonable throughput. The aim of this review is to play between two poles: the need to establish standard processes and tools for research and industry, and the issues that make NIL a scientific endeavor. It is not the author's intention to duplicate the content of the reviews already published, but to look on the NIL process as a whole. The author will also address some issues, which are not covered by the other reviews, e.g., the origin of NIL and the misconceptions, which sometimes dominate the debate about problems of NIL, and guide the reader to issues, which are often forgotten or overlooked.

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Section: F Unwanted Effects and Unsolved Questionsmentioning

confidence: 99%

Nanoimprint lithography: An old story in modern times? A review

Schift

2008

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

676

442

View full text Add to dashboard Cite

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“…Surface texturing has received considerable interest at the micro/nanoscale for its potential applications in optical sensing and detection [1], adhesion [2], photovoltaic [3][4][5], hydrophobicity [6][7][8], tribology [9][10][11] and others [12][13][14][15]. The surface micro/nano-texturing can be used in the field of tribology is inspired by that the texturing can effectively reduce the adhesive force or friction force for the micro/nanoscale devices [9,16].…”

Section: Introductionmentioning

confidence: 98%

Friction behavior of nano-textured polyimide surfaces measured by AFM colloidal probe

Zhang

Che

et al. 2014

Applied Surface Science

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“…Multiple microwell-based platforms have been extensively represented in the state-of-the-art for bead-based digital bioassays. Most commonly, microwell arrays have been obtained through chemical polishing of fiber-glass bundles [4], or through fast and simple hot embossing [5,6,7,8,9,10,11], molding [12,13,14] and injection molding [15] of polymers. However, these methods are either not freely scalable for mass production or do not enable proper sealing of the fluorogenic substrate and seeding of the beads (seeding efficiency of ~40%) [15,16,17,18], both key factors for bead-based digital bioassay performance and reliability.…”

Section: Introductionmentioning

confidence: 99%

Teflon-on-Glass Molding Enables High-Throughput Fabrication of Hydrophilic-in-Hydrophobic Microwells for Bead-Based Digital Bioassays

et al. 2018

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In recent years, Teflon-on-glass microwells have been successfully implemented in bead-based digital bioassays for the sensitive detection of single target molecules. Their hydrophilic-in-hydrophobic (HIH) nature enables the isolation and analysis of individual beads, carrying the target molecules, which can be further manipulated accurately through optical tweezer (OT) setups. However, these Teflon HIH-microwell platforms are conventionally fabricated through a complex, time-consuming and labor-intensive dry lift-off procedure which involves a series of major steps, limiting the up-scaling potential of these platforms. Alternative Teflon-based microwell fabrication methods have been extensively explored in literature but they preclude the generation of hydrophobic wells with hydrophilic bottom, thereby hampering the bioassay performance. Here, we present a new Teflon-on-glass molding method for the high throughput fabrication of hydrophilic-in-hydrophobic (HIH) microwell arrays, able to empower bead-based digital bioassays. Microwells 2.95 μm in depth and 3.86 μm in diameter were obtained to host individual beads. In these microwell arrays, sealing of reagents was demonstrated with an efficiency of 100% and seeding of superparamagnetic beads was achieved with an efficiency of 99.6%. The proposed method requires half as many steps when compared to the traditional dry lift-off process, is freely scalable and has the potential to be implemented in different bead-based bioassay applications.

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Surface texturing of polytetrafluoroethylene by hot embossing

Cited by 30 publications

References 21 publications

Nanoimprint lithography: An old story in modern times? A review

Nanoimprint lithography: An old story in modern times? A review

Friction behavior of nano-textured polyimide surfaces measured by AFM colloidal probe

Teflon-on-Glass Molding Enables High-Throughput Fabrication of Hydrophilic-in-Hydrophobic Microwells for Bead-Based Digital Bioassays

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