Abstract. This paper describes the dynamics of capillary self-alignment of components with initial shift offsets from matching receptor sites. The analysis of the full uniaxial self-alignment dynamics of foil-based mesoscopic dies from pre-alignment to final settling evidenced three distinct, sequential regimes impacting the process performance. The dependence of accuracy, alignment time and repeatability of capillary self-alignment on control parameters such as size, weight, surface energy and initial offset of assembling dies was investigated. Finally, we studied the influence of the dynamic coupling between the degenerate oscillation modes of the system on the alignment performance by means of pre-defined biaxial offsets.Keywords: capillarity, self-alignment, dynamics, fluidics, packaging.Surface tension-driven self-alignment (SA) is a simple, accurate and cost-effective technique for heterogeneous integration and stacking of dies onto pre-patterned substrates. A vast class of fluidic self-assembly processes was thoroughly investigated and developed since the early 90's, and many applications were successfully demonstrated [1-2]. Capillary SA rapidly emerged as a remarkable way to overcome the accuracy/throughput trade-off limiting established techniques of pick-and-place microassembly [3]. It indeed combines the manipulative dexterity of robotic handling for fast and rough component pre-alignment with the highly-accurate and passive final alignment yielded by the relaxation of a liquid droplet over a shape-matching patterned confinement site [4]. Die fetching and registration can thus be partly parallelized, leading to increased efficiency in the integration of innovative microsystems [5]. A more comprehensive knowledge of capillary SA needs further modeling and experimental testing. Within the past two decades researchers made significant progress in the former direction [6][7][8][9][10]. However, most of modeling works are based on quasi-static simulations, whereas the dynamics of the process has been rarely tackled so far.