Surface sulfurization of liner and ruthenium metallization to reduce interface scattering for Low-Resistance interconnect

Chen, Yu-Lin; Hsiao, Kai-Yuan; Lu, Ming-Yen; Yuin Keng, Pei; Chang, Shou-Yi

doi:10.1016/j.apsusc.2024.159318

Applied Surface Science

2024

DOI: 10.1016/j.apsusc.2024.159318

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Surface sulfurization of liner and ruthenium metallization to reduce interface scattering for Low-Resistance interconnect

Yu-Lin Chen,

Kai-Yuan Hsiao,

Ming-Yen Lu

et al.

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Utilizing H2S to sulfurize transition metal and oxide barriers for suppressing resistivity scaling of ruthenium metallization

Chen,

Hsiao,

Jhan

et al. 2024

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Utilizing H2S to sulfurize transition metal and oxide barriers for suppressing resistivity scaling of ruthenium metallization

Chen,

Hsiao,

Jhan

et al. 2024

Thin Solid Films

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Surface sulfurization of liner and ruthenium metallization to reduce interface scattering for Low-Resistance interconnect

Cited by 1 publication

References 46 publications

Utilizing H2S to sulfurize transition metal and oxide barriers for suppressing resistivity scaling of ruthenium metallization

Utilizing H2S to sulfurize transition metal and oxide barriers for suppressing resistivity scaling of ruthenium metallization

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