Surface structures induced by ultrashort laser pulses: Formation mechanisms of ripples and grooves

He, Shutong; Nivas, Jijil Jj; Anoop, K. K.; Vecchione, A.; Hu, Minglie; Bruzzese, R.; Amoruso, S.

doi:10.1016/j.apsusc.2015.07.016

Cited by 76 publications

(44 citation statements)

References 32 publications

(68 reference statements)

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“…This, in turn, suggests a deterministic relationship between orientation and characteristic size of the surface structure and local polarization and fluence of the OV beam. It is worth noting that earlier studies mainly focused on subwavelength ripples [1,2,8,9,[14][15][16]21], while more detailed analyses of microwrinkles produced by fs Gaussian beams started only very recently [24,25]. Our findings indicate that the two structures are ubiquitous to fs laser ablation of silicon.…”

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confidence: 60%

Laser ablation of silicon induced by a femtosecond optical vortex beam

Nivas

Anoop

et al. 2015

Opt. Lett.

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We investigate laser ablation of crystalline silicon induced by a femtosecond optical vortex beam, addressing how beam properties can be obtained by analyzing the ablation crater. The morphology of the surface structures formed in the annular crater surface allows direct visualization of the beam polarization, while analysis of the crater size provides beam spot parameters. We also determine the diverse threshold fluences for the formation of various complex microstructures generated within the annular laser spot on the silicon sample. Our analysis indicates an incubation behavior of the threshold fluence as a function of the number of laser pulses, independent of the optical vortex polarization, in weak focusing conditions.

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confidence: 60%

Laser ablation of silicon induced by a femtosecond optical vortex beam

Nivas

Anoop

et al. 2015

Opt. Lett.

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“…Recently, He et al . 32 proposed to analyze the regularity of LIPSS by using the inverse Fourier transformation for converting the Sipe efficacy factor calculated along with the transient excitation of Si (the so-called “Drude-Sipe” model 33 – 35 ) from the wave vector domain to the real spatial domain. Based on this approach, the model allowed to reveal the presence of long-range periodicity structures and bifurcation points, defined as localized geometrical aberrations, which must be suppressed for the development of applications based on highly regular nanostructures.…”

Section: Resultsmentioning

confidence: 99%

High-speed manufacturing of highly regular femtosecond laser-induced periodic surface structures: physical origin of regularity

Gnilitskyi

Derrien

Lévy

et al. 2017

Sci Rep

271

179

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Highly regular laser-induced periodic surface structures (HR-LIPSS) have been fabricated on surfaces of Mo, steel alloy and Ti at a record processing speed on large areas and with a record regularity in the obtained sub-wavelength structures. The physical mechanisms governing LIPSS regularity are identified and linked with the decay length (i.e. the mean free path) of the excited surface electromagnetic waves (SEWs). The dispersion of the LIPSS orientation angle well correlates with the SEWs decay length: the shorter this length, the more regular are the LIPSS. A material dependent criterion for obtaining HR-LIPSS is proposed for a large variety of metallic materials. It has been found that decreasing the spot size close to the SEW decay length is a key for covering several cm2 of material surface by HR-LIPSS in a few seconds. Theoretical predictions suggest that reducing the laser wavelength can provide the possibility of HR-LIPSS production on principally any metal. This new achievement in the unprecedented level of control over the laser-induced periodic structure formation makes this laser-writing technology to be flexible, robust and, hence, highly competitive for advanced industrial applications based on surface nanostructuring.

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“…More recently, attention is also focused on other supervening quasi-periodic surface microstructures with orientation parallel to laser polarization, named as grooves, which form on semiconductors (Si and InP, e.g.) irradiated by a large number of laser pulses and at higher fluence than ripples 4 5 6 7 .…”

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confidence: 99%

Direct Femtosecond Laser Surface Structuring with Optical Vortex Beams Generated by a q-plate

Nivas

Rubano

et al. 2015

Sci Rep

Self Cite

127

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Creation of patterns and structures on surfaces at the micro- and nano-scale is a field of growing interest. Direct femtosecond laser surface structuring with a Gaussian-like beam intensity profile has already distinguished itself as a versatile method to fabricate surface structures on metals and semiconductors. Here we present an approach for direct femtosecond laser surface structuring based on optical vortex beams with different spatial distributions of the state of polarization, which are easily generated by means of a q-plate. The different states of an optical vortex beam carrying an orbital angular momentum ℓ = ±1 are used to demonstrate the fabrication of various regular surface patterns on silicon. The spatial features of the regular rippled and grooved surface structures are correlated with the state of polarization of the optical vortex beam. Moreover, scattered surface wave theory approach is used to rationalize the dependence of the surface structures on the local state of the laser beam characteristics (polarization and fluence). The present approach can be further extended to fabricate even more complex and unconventional surface structures by exploiting the possibilities offered by femtosecond optical vector fields.

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Surface structures induced by ultrashort laser pulses: Formation mechanisms of ripples and grooves

Cited by 76 publications

References 32 publications

Laser ablation of silicon induced by a femtosecond optical vortex beam

Laser ablation of silicon induced by a femtosecond optical vortex beam

High-speed manufacturing of highly regular femtosecond laser-induced periodic surface structures: physical origin of regularity

Direct Femtosecond Laser Surface Structuring with Optical Vortex Beams Generated by a q-plate

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